Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513116 | Atomic layer deposition of tungsten materials | Amit Khandelwal, Avgerinos V. Gelatos, Kai Wu | 2013-08-20 |
| 8211799 | Atomic layer deposition of tungsten materials | Amit Khandelwal, Avgerinos V. Gelatos, Kai Wu | 2012-07-03 |
| 7964505 | Atomic layer deposition of tungsten materials | Amit Khandelwal, Avgerinog V. Gelatos, Kai Wu | 2011-06-21 |
| 7745333 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ken Kaung Lai, Ravi Rajagopalan, Amit Khandelwal, Srinivas Gandikota, Joseph Castro +9 more | 2010-06-29 |
| 7691442 | Ruthenium or cobalt as an underlayer for tungsten film deposition | Srinivas Gandikota, Amit Khandelwal, Avgerinos V. Gelatos, Mei Chang, Kavita Shah +1 more | 2010-04-06 |
| 7429402 | Ruthenium as an underlayer for tungsten film deposition | Srinivas Gandikota, Amit Khandelwal, Avgerinos V. Gelatos, Mei Chang, Kavita Shah +1 more | 2008-09-30 |
| 7405158 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ken Kaung Lai, Ravi Rajagopalan, Amit Khandelwal, Srinivas Gandikota, Joseph Castro +9 more | 2008-07-29 |