Issued Patents All Time
Showing 1–25 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406849 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Pingyan Lei, Mei Chang, Xianmin Tang | 2025-09-02 |
| 12356705 | Electrical contact cavity structure and methods of forming the same | Nicolas L. Breil, Lisa McGill, Manoj Vellaikal, Bocheng Cao, Pei Liu | 2025-07-08 |
| 12347695 | Methods for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Tae Hong Ha, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2025-07-01 |
| 12293902 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Yu Lei, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |
| 12281387 | Method of depositing metal films | Feng Q. Liu, Mark Saly, David Thompson, Annamalai Lakshmanan, Joung Joo Lee | 2025-04-22 |
| 12094785 | Dual silicide process using ruthenium silicide | Thomas Anthony Empante, Zhibo Yuan, Liqi Wu, Joung Joo Lee, Byunghoon Yoon | 2024-09-17 |
| 11887855 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2024-01-30 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, David T. Or +8 more | 2023-10-03 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou +3 more | 2023-05-23 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Xiaoxiong Yuan +4 more | 2023-03-07 |
| 11430661 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Pingyan Lei, Mei Chang, Xianmin Tang | 2022-08-30 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Tae Hong Ha, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2022-08-23 |
| 11387134 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Yu Lei, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, David T. Or +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito +13 more | 2022-06-07 |
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Takashi Kuratomi, Xianmin Tang, Sanjay Natarajan, Keyvan Kashefizadeh +3 more | 2021-09-07 |
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2021-04-20 |
| 10770300 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Takashi Kuratomi, I-Cheng Chen, Faruk Gungor | 2020-09-08 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2020-06-30 |
| 10615034 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel | Bo Zheng, Anshul Ashok Vyas, Raymond Hung | 2020-04-07 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Takashi Kuratomi, Vikash Banthia, Mei Chang, Kazuya Daito | 2020-01-14 |
| 10418246 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Takashi Kuratomi, I-Cheng Chen, Faruk Gungor | 2019-09-17 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2019-04-23 |
| 10256076 | Substrate processing apparatus and methods | Shi Wei Toh, Vikash Banthia | 2019-04-09 |
| 10199230 | Methods for selective deposition of metal silicides via atomic layer deposition cycles | Seshadri Ganguli, Yixiong Yang, Bhushan Zope, Xinyu Fu, Guoqiang Jian +1 more | 2019-02-05 |