Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398808 | High conductance variable orifice valve | Sanjeev Baluja | 2025-08-26 |
| D1080812 | Gas mixer | Youngki Chang, Dhritiman Subha Kashyap, Rakesh Ramadas, Ashutosh Agarwal, Shashidhara Patel H B +1 more | 2025-06-24 |
| 12305284 | Apparatus and methods for fine planar non-uniformity improvement | Mario D. Silvetti, Mandyam Sriram, Sanjeev Baluja | 2025-05-20 |
| 12308218 | Thermal shield for processing chamber | Youngki Chang, Kartik Shah, Dhritiman Subha Kashyap, Dhivanraj Subramanian | 2025-05-20 |
| 12293902 | Process kit for a substrate support | Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |
| 12276344 | Self-adjustable variable orifice check valve for back pressure reduction | Sanjeev Baluja | 2025-04-15 |
| 12224195 | Centering wafer for processing chamber | Sanjeev Baluja | 2025-02-11 |
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhammad M. Rasheed, Mario D. Sanchez, Anqing Cui | 2024-08-06 |
| 11976363 | Purge ring for pedestal assembly | Mario D. Silvetti, Kevin Griffin | 2024-05-07 |
| 11944988 | Multi-zone showerhead | Muhammad M. Rasheed | 2024-04-02 |
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhammad M. Rasheed, Mario D. Sanchez, Anqing Cui | 2023-09-26 |
| 11767593 | High temperature vacuum seal | Muhammad M. Rasheed | 2023-09-26 |
| 11732358 | High temperature chemical vapor deposition lid | Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2023-08-22 |
| 11719255 | Pumping liner for improved flow uniformity | Muhammad M. Rasheed, Mario D. Sanchez | 2023-08-08 |
| 11708850 | Self-tightening fastening apparatus for vibrating work-parts | Nusrat Jahan Chhanda | 2023-07-25 |
| 11598454 | Apparatus and methods to prevent particle entry into gas lines | Muhammad M. Rasheed | 2023-03-07 |
| 11495932 | Slip ring for use in rotatable substrate support | Yu Chang, William Kuang, Muhammad M. Rasheed, Xiping Huo | 2022-11-08 |
| 11479859 | High temperature vacuum seal | Muhammad M. Rasheed | 2022-10-25 |
| 11447866 | High temperature chemical vapor deposition lid | Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2022-09-20 |
| 11427912 | High temperature rotation module for a processing chamber | Muhammad M. Rasheed | 2022-08-30 |
| 11420217 | Showerhead for ALD precursor delivery | Muhammad M. Rasheed | 2022-08-23 |
| 11415147 | Pumping liner for improved flow uniformity | Muhammad M. Rasheed, Mario D. Sanchez | 2022-08-16 |
| 11408530 | Valve for varying flow conductance under vacuum | Muhammad M. Rasheed | 2022-08-09 |
| D959516 | Compression fitting | Muhammad M. Rasheed | 2022-08-02 |
| 11387134 | Process kit for a substrate support | Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |