Issued Patents All Time
Showing 25 most recent of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315745 | Heater cover plate for uniformity improvement | Ilker Durukan | 2025-05-27 |
| 12293902 | Process kit for a substrate support | Muhannad Mustafa, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Mario D. Sanchez, Anqing Cui | 2024-08-06 |
| 11944988 | Multi-zone showerhead | Muhannad Mustafa | 2024-04-02 |
| 11932939 | Lids and lid assembly kits for atomic layer deposition chambers | Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more | 2024-03-19 |
| 11915917 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | Alan A. Ritchie, John C. Forster | 2024-02-27 |
| 11767593 | High temperature vacuum seal | Muhannad Mustafa | 2023-09-26 |
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Mario D. Sanchez, Anqing Cui | 2023-09-26 |
| 11732358 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2023-08-22 |
| 11719255 | Pumping liner for improved flow uniformity | Muhannad Mustafa, Mario D. Sanchez | 2023-08-08 |
| 11598454 | Apparatus and methods to prevent particle entry into gas lines | Muhannad Mustafa | 2023-03-07 |
| 11566327 | Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system | Ilker Durukan, Kenric Choi, Tatsuya Sato | 2023-01-31 |
| 11562914 | Heater cover plate for uniformity improvement | Ilker Durukan | 2023-01-24 |
| 11495932 | Slip ring for use in rotatable substrate support | Muhannad Mustafa, Yu Chang, William Kuang, Xiping Huo | 2022-11-08 |
| 11479859 | High temperature vacuum seal | Muhannad Mustafa | 2022-10-25 |
| 11447866 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2022-09-20 |
| 11427912 | High temperature rotation module for a processing chamber | Muhannad Mustafa | 2022-08-30 |
| 11420217 | Showerhead for ALD precursor delivery | Muhannad Mustafa | 2022-08-23 |
| 11415147 | Pumping liner for improved flow uniformity | Muhannad Mustafa, Mario D. Sanchez | 2022-08-16 |
| 11408530 | Valve for varying flow conductance under vacuum | Muhannad Mustafa | 2022-08-09 |
| D959516 | Compression fitting | Muhannad Mustafa | 2022-08-02 |
| 11387134 | Process kit for a substrate support | Muhannad Mustafa, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |
| 11384432 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more | 2022-07-12 |
| 11236424 | Process kit for improving edge film thickness uniformity on a substrate | Muhannad Mustafa | 2022-02-01 |
| 11186910 | Apparatus for multi-flow precursor dosage | Muhannad Mustafa | 2021-11-30 |