| 12315745 |
Heater cover plate for uniformity improvement |
Ilker Durukan |
2025-05-27 |
|
| 12293902 |
Process kit for a substrate support |
Muhannad Mustafa, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more |
2025-05-06 |
|
| 12054826 |
ALD cycle time reduction using process chamber lid with tunable pumping |
Muhannad Mustafa, Mario D. Sanchez, Anqing Cui |
2024-08-06 |
$90,312,000 |
| 11944988 |
Multi-zone showerhead |
Muhannad Mustafa |
2024-04-02 |
$42,223,000 |
| 11932939 |
Lids and lid assembly kits for atomic layer deposition chambers |
Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more |
2024-03-19 |
$54,086,000 |
| 11915917 |
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber |
Alan A. Ritchie, John C. Forster |
2024-02-27 |
$57,915,000 |
| 11767590 |
ALD cycle time reduction using process chamber lid with tunable pumping |
Muhannad Mustafa, Mario D. Sanchez, Anqing Cui |
2023-09-26 |
$66,272,000 |
| 11767593 |
High temperature vacuum seal |
Muhannad Mustafa |
2023-09-26 |
$66,272,000 |
| 11732358 |
High temperature chemical vapor deposition lid |
Muhannad Mustafa, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang |
2023-08-22 |
$40,609,000 |
| 11719255 |
Pumping liner for improved flow uniformity |
Muhannad Mustafa, Mario D. Sanchez |
2023-08-08 |
$46,911,000 |
| 11598454 |
Apparatus and methods to prevent particle entry into gas lines |
Muhannad Mustafa |
2023-03-07 |
$32,704,000 |
| 11566327 |
Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system |
Ilker Durukan, Kenric Choi, Tatsuya Sato |
2023-01-31 |
$29,381,000 |
| 11562914 |
Heater cover plate for uniformity improvement |
Ilker Durukan |
2023-01-24 |
$45,726,000 |
| 11495932 |
Slip ring for use in rotatable substrate support |
Muhannad Mustafa, Yu Chang, William Kuang, Xiping Huo |
2022-11-08 |
$47,551,000 |
| 11479859 |
High temperature vacuum seal |
Muhannad Mustafa |
2022-10-25 |
$42,554,000 |
| 11447866 |
High temperature chemical vapor deposition lid |
Muhannad Mustafa, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang |
2022-09-20 |
$25,949,000 |
| 11427912 |
High temperature rotation module for a processing chamber |
Muhannad Mustafa |
2022-08-30 |
$41,861,000 |
| 11420217 |
Showerhead for ALD precursor delivery |
Muhannad Mustafa |
2022-08-23 |
$37,610,000 |
| 11415147 |
Pumping liner for improved flow uniformity |
Muhannad Mustafa, Mario D. Sanchez |
2022-08-16 |
$38,686,000 |
| 11408530 |
Valve for varying flow conductance under vacuum |
Muhannad Mustafa |
2022-08-09 |
$67,965,000 |
| D959516 |
Compression fitting |
Muhannad Mustafa |
2022-08-02 |
|
| 11384432 |
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate |
Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more |
2022-07-12 |
$30,931,000 |
| 11387134 |
Process kit for a substrate support |
Muhannad Mustafa, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more |
2022-07-12 |
$30,931,000 |
| 11236424 |
Process kit for improving edge film thickness uniformity on a substrate |
Muhannad Mustafa |
2022-02-01 |
$81,914,000 |
| 11186910 |
Apparatus for multi-flow precursor dosage |
Muhannad Mustafa |
2021-11-30 |
$50,552,000 |
