Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915917 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | John C. Forster, Muhammad M. Rasheed | 2024-02-27 |
| 11908998 | Liquid electrolyte for lithium metal battery | Bernd J. Neudecker, Karl M. Brown, Andrew Basile | 2024-02-20 |
| 11811051 | Electrochemical cell design with lithium metal anode | Karl M. Brown, Lin Ma, Korhan Demirkan, Andrew Basile, Richard M. Mank +1 more | 2023-11-07 |
| 11728547 | Polymer electrolyte lamination layer for lithium metal battery | Lin Ma, Bernd J. Neudecker, Richard M. Mank | 2023-08-15 |
| 11309540 | Anode structure for a lithium metal battery | Karl M. Brown | 2022-04-19 |
| 11162170 | Methods for reducing material overhang in a feature of a substrate | Zhenbin Ge, Jenn-Yue Wang, Sally S. Lou | 2021-11-02 |
| 10886567 | Liquid electrolyte for a lithium metal battery | Paul M. Bayley, Karl M. Brown | 2021-01-05 |
| 10847834 | Corrosion resistant current collector for lithium metal anode | Karl M. Brown | 2020-11-24 |
| 10741835 | Anode structure for a lithium metal battery | Karl M. Brown | 2020-08-11 |
| 10692706 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | John C. Forster, Muhammad M. Rasheed | 2020-06-23 |
| 10099245 | Process kit for deposition and etching | John C. Forster, Zhenbin Ge | 2018-10-16 |
| 9957601 | Apparatus for gas injection in a physical vapor deposition chamber | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, Isaac Porras, Keith A. Miller | 2018-05-01 |
| 9812303 | Configurable variable position closed track magnetron | Ryan Edwin Hanson, Xianwei Zhao | 2017-11-07 |
| 9695502 | Process kit with plasma-limiting gap | Donny Young | 2017-07-04 |
| 9611539 | Crystalline orientation and overhang control in collision based RF plasmas | Zhenbin Ge, Adolph Miller Allen | 2017-04-04 |
| 9593410 | Methods and apparatus for stable substrate processing with multiple RF power supplies | Zhenbin Ge | 2017-03-14 |
| 9593417 | Gas line weldment design and process for CVD aluminum | Wei Ti Lee, Ted Guo, Steve H. Chiao | 2017-03-14 |
| 9580796 | Deposition apparatus and methods to reduce deposition asymmetry | Michael S. Cox | 2017-02-28 |
| 9404174 | Pinned target design for RF capacitive coupled plasma | Donny Young | 2016-08-02 |
| 9340866 | Substrate support with radio frequency (RF) return path | Donny Young, Wei Wang, Ananthkrishna Jupudi, Thanh X. Nguyen, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9315891 | Methods for processing a substrate using multiple substrate support positions | Joung Joo Lee, William Johanson, Keith A. Miller | 2016-04-19 |
| 9303311 | Substrate processing system with mechanically floating target assembly | Donny Young, Uday Pai, Muhammad M. Rasheed, Keith A. Miller | 2016-04-05 |
| 9255322 | Substrate processing system having symmetric RF distribution and return paths | Donny Young, Muhammad M. Rasheed, Keith A. Miller | 2016-02-09 |
| 9218961 | Methods of forming a metal containing layer on a substrate with high uniformity and good profile control | Zhenbin Ge, Adolph Miller Allen | 2015-12-22 |
| 9177763 | Method and apparatus for measuring pressure in a physical vapor deposition chamber | Muhammad M. Rasheed, Isaac Porras, Keith A. Miller | 2015-11-03 |