| 11915917 |
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber |
John C. Forster, Muhammad M. Rasheed |
2024-02-27 |
$57,915,000 |
| 11908998 |
Liquid electrolyte for lithium metal battery |
Bernd J. Neudecker, Karl M. Brown, Andrew Basile |
2024-02-20 |
$143,830,000 |
| 11811051 |
Electrochemical cell design with lithium metal anode |
Karl M. Brown, Lin Ma, Korhan Demirkan, Andrew Basile, Richard M. Mank +1 more |
2023-11-07 |
$200,618,000 |
| 11728547 |
Polymer electrolyte lamination layer for lithium metal battery |
Lin Ma, Bernd J. Neudecker, Richard M. Mank |
2023-08-15 |
$190,320,000 |
| 11309540 |
Anode structure for a lithium metal battery |
Karl M. Brown |
2022-04-19 |
$219,368,000 |
| 11162170 |
Methods for reducing material overhang in a feature of a substrate |
Zhenbin Ge, Jenn-Yue Wang, Sally S. Lou |
2021-11-02 |
$95,673,000 |
| 10886567 |
Liquid electrolyte for a lithium metal battery |
Paul M. Bayley, Karl M. Brown |
2021-01-05 |
$299,526,000 |
| 10847834 |
Corrosion resistant current collector for lithium metal anode |
Karl M. Brown |
2020-11-24 |
$169,360,000 |
| 10741835 |
Anode structure for a lithium metal battery |
Karl M. Brown |
2020-08-11 |
$147,060,000 |
| 10692706 |
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber |
John C. Forster, Muhammad M. Rasheed |
2020-06-23 |
$29,749,000 |
| 10099245 |
Process kit for deposition and etching |
John C. Forster, Zhenbin Ge |
2018-10-16 |
$21,789,000 |
| 9957601 |
Apparatus for gas injection in a physical vapor deposition chamber |
Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, Isaac Porras, Keith A. Miller |
2018-05-01 |
$18,276,000 |
| 9812303 |
Configurable variable position closed track magnetron |
Ryan Edwin Hanson, Xianwei Zhao |
2017-11-07 |
$31,945,000 |
| 9695502 |
Process kit with plasma-limiting gap |
Donny Young |
2017-07-04 |
|
| 9611539 |
Crystalline orientation and overhang control in collision based RF plasmas |
Zhenbin Ge, Adolph Miller Allen |
2017-04-04 |
$16,159,000 |
| 9593410 |
Methods and apparatus for stable substrate processing with multiple RF power supplies |
Zhenbin Ge |
2017-03-14 |
$16,778,000 |
| 9593417 |
Gas line weldment design and process for CVD aluminum |
Wei Ti Lee, Ted Guo, Steve H. Chiao |
2017-03-14 |
$16,778,000 |
| 9580796 |
Deposition apparatus and methods to reduce deposition asymmetry |
Michael S. Cox |
2017-02-28 |
$9,499,000 |
| 9404174 |
Pinned target design for RF capacitive coupled plasma |
Donny Young |
2016-08-02 |
$10,698,000 |
| 9340866 |
Substrate support with radio frequency (RF) return path |
Donny Young, Wei Wang, Ananthkrishna Jupudi, Thanh X. Nguyen, Kirankumar Neelasandra SAVANDAIAH |
2016-05-17 |
$7,135,000 |
| 9315891 |
Methods for processing a substrate using multiple substrate support positions |
Joung Joo Lee, William Johanson, Keith A. Miller |
2016-04-19 |
$19,369,000 |
| 9303311 |
Substrate processing system with mechanically floating target assembly |
Donny Young, Uday Pai, Muhammad M. Rasheed, Keith A. Miller |
2016-04-05 |
$9,374,000 |
| 9255322 |
Substrate processing system having symmetric RF distribution and return paths |
Donny Young, Muhammad M. Rasheed, Keith A. Miller |
2016-02-09 |
$18,126,000 |
| 9218961 |
Methods of forming a metal containing layer on a substrate with high uniformity and good profile control |
Zhenbin Ge, Adolph Miller Allen |
2015-12-22 |
$10,069,000 |
| 9177763 |
Method and apparatus for measuring pressure in a physical vapor deposition chamber |
Muhammad M. Rasheed, Isaac Porras, Keith A. Miller |
2015-11-03 |
$6,969,000 |
