Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124002 | Beam deflector metasurface | Daryl I. Vulis, Brandon J. Hui, Christian Ocier, Shang Wang, Tong Chen +1 more | 2024-10-22 |
| 11333924 | Displays with direct-lit backlight units | Wei Lv, Pee Khiam So, Wenyong Zhu, Daming Xu, Victor H. Yin +8 more | 2022-05-17 |
| 11162170 | Methods for reducing material overhang in a feature of a substrate | Alan A. Ritchie, Jenn-Yue Wang, Sally S. Lou | 2021-11-02 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10667341 | Light projector with integrated integrity sensor | Moshe Kriman, Adar Magen, Arun Kumar Nallani Chakravartula, Gregory A. Cohoon, Eamon Han O'Connor +4 more | 2020-05-26 |
| 10591645 | Electronic devices having scratch-resistant antireflection coatings | Xianwei Zhao, Wookyung Bae, Sunggu Kang, Ligang Wang, Avery P. Yuen +2 more | 2020-03-17 |
| 10400335 | Dual-direction chemical delivery system for ALD/CVD chambers | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2019-09-03 |
| 10400327 | Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor | Mohammad Kamruzzaman Chowdhury, Adolph Miller Allen | 2019-09-03 |
| 10334184 | Electronic device with light diffuser | Ligang Wang, Miodrag Scepanovic, Neil MacKinnon | 2019-06-25 |
| 10266940 | Auto capacitance tuner current compensation to control one or more film properties through target life | Vivek Gupta, Adolph Miller Allen, Ryan Edwin Hanson | 2019-04-23 |
| 10242873 | RF power compensation to control film stress, density, resistivity, and/or uniformity through target life | Adolph Miller Allen | 2019-03-26 |
| 10099245 | Process kit for deposition and etching | John C. Forster, Alan A. Ritchie | 2018-10-16 |
| D825505 | Target profile for a physical vapor deposition chamber target | Ryan Edwin Hanson, Vivek Gupta | 2018-08-14 |
| D798248 | Target profile for a physical vapor deposition chamber target | Ryan Edwin Hanson, Vivek Gupta | 2017-09-26 |
| 9765432 | Dual-direction chemical delivery system for ALD/CVD chambers | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2017-09-19 |
| 9759984 | Adjustable solid film camera aperture | Tingjun Xu, Jeffrey N. Gleason, Linsen Bie, Ligang Wang, Wookyung Bae +1 more | 2017-09-12 |
| 9611539 | Crystalline orientation and overhang control in collision based RF plasmas | Alan A. Ritchie, Adolph Miller Allen | 2017-04-04 |
| 9593410 | Methods and apparatus for stable substrate processing with multiple RF power supplies | Alan A. Ritchie | 2017-03-14 |
| 9472443 | Selectively groundable cover ring for substrate process chambers | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, William Johanson, Goichi Yoshidome | 2016-10-18 |
| 9353440 | Dual-direction chemical delivery system for ALD/CVD chambers | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2016-05-31 |
| 9218961 | Methods of forming a metal containing layer on a substrate with high uniformity and good profile control | Alan A. Ritchie, Adolph Miller Allen | 2015-12-22 |
| 9028659 | Magnetron design for extended target life in radio frequency (RF) plasmas | Alan A. Ritchie, Tza-Jing Gung, Vivek Gupta | 2015-05-12 |
| 8865012 | Methods for processing a substrate using a selectively grounded and movable process kit ring | Alan A. Ritchie | 2014-10-21 |
| 8268684 | Method and apparatus for trench and via profile modification | Mei Chang, Chien-Teh Kao, Xinliang Lu | 2012-09-18 |
| 8252696 | Selective etching of silicon nitride | Xinliang Lu, Haichun Yang, Nan Lu, David T. Or, Chien-Teh Kao +1 more | 2012-08-28 |