Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368028 | Apparatus for improved high pressure plasma processing | Cory Eugene Lafollett, Kirankumar Neelasandra SAVANDAIAH | 2025-07-22 |
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | Keith A. Miller, Cheng-Hsiung Tsai, John C. Forster, Mukund Sundararajan | 2024-06-18 |
| 11655534 | Apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, Prashanth Kothnur | 2023-05-23 |
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, Prashanth Kothnur | 2022-09-20 |
| 11361982 | Methods and apparatus for in-situ cleaning of electrostatic chucks | Kirankumar Neelasandra SAVANDAIAH, David Gunther, Prashant Prabhakar Prabhu | 2022-06-14 |
| 11270898 | Apparatus for enhancing flow uniformity in a process chamber | Jothilingam Ramalingam, Kirankumar Neelasandra SAVANDAIAH, Fuhong Zhang | 2022-03-08 |
| 11056325 | Methods and apparatus for substrate edge uniformity | Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao +1 more | 2021-07-06 |
| 11049701 | Biased cover ring for a substrate processing system | Adolph Miller Allen, Viachslav Babayan, Zhong Qiang Hua, Carl Johnson, Vanessa Faune +4 more | 2021-06-29 |
| 11024490 | Magnetron having enhanced target cooling configuration | Vanessa Faune, Kirankumar Neelasandra SAVANDAIAH | 2021-06-01 |
| D902165 | Target profile for a physical vapor deposition chamber target | Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2020-11-17 |
| D894137 | Target profile for a physical vapor deposition chamber target | Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2020-08-25 |
| 10648071 | Process kit having a floating shadow ring | Siew Kit Hoi, John Mazzocco, Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2020-05-12 |
| D877101 | Target profile for a physical vapor deposition chamber target | Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2020-03-03 |
| D851613 | Target profile for a physical vapor deposition chamber target | Kirankumar Neelasandra SAVANDAIAH, Anthony Chih-Tung Chan, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2019-06-18 |
| 10283334 | Methods and apparatus for maintaining low non-uniformity over target life | Fuhong Zhang, Adolph Miller Allen, Yu Liu | 2019-05-07 |
| 10103012 | One-piece process kit shield for reducing the impact of an electric field near the substrate | Kirankumar Neelasandra SAVANDAIAH | 2018-10-16 |
| D825504 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu, Adolph Miller Allen, Brij Datta, Keith A. Miller | 2018-08-14 |
| 9991101 | Magnetron assembly for physical vapor deposition chamber | Brij Datta, Fuhong Zhang, Adolph Miller Allen, Yu Liu, Prashanth Kothnur | 2018-06-05 |
| 9953812 | Integrated process kit for a substrate processing chamber | Kirankumar Neelasandra SAVANDAIAH, Xin Wang, Prashant Prabhakar Prabhu | 2018-04-24 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | Kirankumar Neelasandra SAVANDAIAH, Adolph Miller Allen, Xin Wang, Prashant Prabhakar Prabhu | 2018-03-06 |
| D797067 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu, Adolph Miller Allen, Brij Datta, Keith A. Miller | 2017-09-12 |
| 9472443 | Selectively groundable cover ring for substrate process chambers | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, Zhenbin Ge, Goichi Yoshidome | 2016-10-18 |
| 9315891 | Methods for processing a substrate using multiple substrate support positions | Joung Joo Lee, Keith A. Miller, Alan A. Ritchie | 2016-04-19 |
| 7737035 | Dual seal deposition process chamber and process | Gary Lind, Colin F. Smith, Thomas M. Pratt, John Mazzocco | 2010-06-15 |
| 6405101 | Wafer centering system and method | Craig L. Stevens, Steve Kleinke, Damon Tyrone Genetti | 2002-06-11 |