Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183560 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Kirankumar Neelasandra SAVANDAIAH, Shane Lavan, Sundarapandian Ramalinga Vijayalakshmi REDDY, Yong Cao | 2024-12-31 |
| 11935732 | Process kit geometry for particle reduction in PVD processes | Adolph Miller Allen, Kirankumar Neelasandra SAVANDAIAH, Vanessa Faune | 2024-03-19 |
| 11600477 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Kirankumar Neelasandra SAVANDAIAH, Shane Lavan, Sundarapandian Ramalinga Vijayalakshmi REDDY, Yong Cao | 2023-03-07 |
| 11056325 | Methods and apparatus for substrate edge uniformity | Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Yong Cao, Xianmin Tang +1 more | 2021-07-06 |