Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338527 | Shutter disk for physical vapor deposition (PVD) chamber | Zhiyong Wang, Halbert Chong, Irena H. Wysok, Jianxin Lei, Rongjun Wang +2 more | 2025-06-24 |
| D1072774 | Target profile for a physical vapor deposition chamber target | Shane Lavan, Madan Kumar Shimoga Mylarappa, Avinash NAYAK, Wei Dou, Yong Cao +2 more | 2025-04-29 |
| 12183560 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Kirankumar Neelasandra SAVANDAIAH, Shane Lavan, Randal Dean Schmieding, Yong Cao | 2024-12-31 |
| 11898236 | Methods and apparatus for processing a substrate | Zhiyong Wang, Halbert Chong, John C. Forster, Irena H. Wysok, Tiefeng Shi +9 more | 2024-02-13 |
| 11600477 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Kirankumar Neelasandra SAVANDAIAH, Shane Lavan, Randal Dean Schmieding, Yong Cao | 2023-03-07 |
| 11049701 | Biased cover ring for a substrate processing system | Adolph Miller Allen, William Johanson, Viachslav Babayan, Zhong Qiang Hua, Carl Johnson +4 more | 2021-06-29 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen, Muhammad M. Rasheed +1 more | 2019-02-05 |