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Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao, Xianmin Tang +1 more |
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Process kit and method for processing a substrate |
Weimin Zeng, Yong Cao |
2021-01-05 |
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Systems and methods for low resistivity physical vapor deposition of a tungsten film |
Jothilingam Ramalingam, Zhiyong Wang, Jianxin Lei, Xianmin Tang |
2020-08-04 |
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Target retaining apparatus |
Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Muhammad M. Rasheed +1 more |
2019-02-05 |
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Extended dark space shield |
Rongjun Wang, Muhammad M. Rasheed, Xianmin Tang |
2018-10-09 |
| 10043670 |
Systems and methods for low resistivity physical vapor deposition of a tungsten film |
Jothilingam Ramalingam, Zhiyong Wang, Jianxin Lei, Xianmin Tang |
2018-08-07 |
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Physical vapor deposition (PVD) target having low friction pads |
Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed +1 more |
2018-05-01 |
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Apparatus for PVD dielectric deposition |
Keith A. Miller, Ilya Lavitsky, Randy D. Schmieding, Prashanth Kothnur |
2018-03-27 |
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Particle reduction in a physical vapor deposition chamber |
Weimin Zeng, Yong Cao |
2017-09-26 |
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Methods for depositing dielectric films via physical vapor deposition processes |
Weimin Zeng, Yana Cheng, Yong Cao, Daniel Lee Diehl, Srinivas Guggilla +2 more |
2017-04-25 |
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Target for PVD sputtering system |
Yong Cao, Muhammad M. Rasheed, Xianmin Tang |
2017-04-25 |
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Substrate support with radio frequency (RF) return path |
Alan A. Ritchie, Donny Young, Wei Wang, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH |
2016-05-17 |
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Variable radius dual magnetron |
Rongjun Wang, Muhammad M. Rasheed, Xianmin Tang |
2016-03-08 |
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Uniformity tuning capable ESC grounding kit for RF PVD chamber |
Muhammad M. Rasheed, Rongjun Wang, Alan A. Ritchie |
2015-07-21 |
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Low resistivity tungsten PVD with enhanced ionization and RF power coupling |
Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more |
2014-11-25 |
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Magnetron design for RF/DC physical vapor deposition |
Rongjun Wang, Sally S. Lou, Muhammad M. Rasheed, Jianxin Lei, Xianmin Tang +4 more |
2013-11-12 |
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Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming |
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Apparatus and method for detecting a brush liftoff in a synchronous generator rotor circuit |
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Apparatus and method for detecting a brush liftoff in a synchronous generator rotor circuit |
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2009-03-03 |
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Method and apparatus for measuring fluid flow |
G. Dickey Arndt, James R. Carl |
1997-10-07 |
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Capacitance probe for fluid flow and volume measurements |
G. Dickey Arndt, James R. Carl |
1997-01-21 |