| D1037954 |
Self-retained low friction pad |
Keith A. Miller |
2024-08-06 |
| 12027354 |
Cleaning of SIN with CCP plasma or RPS clean |
Jothilingam Ramalingam, Yong Cao, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more |
2024-07-02 |
| 11915918 |
Cleaning of sin with CCP plasma or RPS clean |
Jothilingam Ramalingam, Yong Cao, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more |
2024-02-27 |
| 11670493 |
Isolator ring clamp and physical vapor deposition chamber incorporating same |
Keith A. Miller |
2023-06-06 |
| 11618943 |
PVD target having self-retained low friction pads |
Keith A. Miller |
2023-04-04 |
| D970566 |
Sputter target for a physical vapor deposition chamber |
Martin Lee Riker, William Fruchterman, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH |
2022-11-22 |
| 11339466 |
Heated shield for physical vapor deposition chamber |
Keith A. Miller, Goichi Yoshidome |
2022-05-24 |
| D941371 |
Process shield for a substrate processing chamber |
Keith A. Miller, Goichi Yoshidome |
2022-01-18 |
| D941372 |
Process shield for a substrate processing chamber |
Keith A. Miller, Goichi Yoshidome |
2022-01-18 |
| D937329 |
Sputter target for a physical vapor deposition chamber |
Martin Lee Riker, William Fruchterman, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH |
2021-11-30 |
| D934315 |
Deposition ring for a substrate processing chamber |
Keith A. Miller, Goichi Yoshidome |
2021-10-26 |
| 10998172 |
Substrate processing chamber having improved process volume sealing |
Keith A. Miller, John Mazzocco |
2021-05-04 |
| 9928997 |
Apparatus for PVD dielectric deposition |
Keith A. Miller, Thanh X. Nguyen, Randy D. Schmieding, Prashanth Kothnur |
2018-03-27 |
| 9564348 |
Shutter blade and robot blade with CTE compensation |
Keith A. Miller |
2017-02-07 |
| 8865602 |
Edge ring lip |
Joseph M. Ranish, Wolfgang Aderhold, Blake Koelmel |
2014-10-21 |
| 7670436 |
Support ring assembly |
Keith A. Miller |
2010-03-02 |
| 7569125 |
Shields usable with an inductively coupled plasma reactor |
Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Marc Schweitzer +1 more |
2009-08-04 |
| 7371285 |
Motorized chamber lid |
Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Alvin Lau, Michael Feltsman |
2008-05-13 |
| 7041201 |
Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith |
Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Marc Schweitzer +1 more |
2006-05-09 |
| 6776848 |
Motorized chamber lid |
Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Alvin Lau, Michael Feltsman |
2004-08-17 |
| 6730174 |
Unitary removable shield assembly |
Alan Liu, Michael Rosenstein |
2004-05-04 |
| 6688838 |
Cleanroom lift having an articulated arm |
Michael Rosenstein |
2004-02-10 |
