Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1037954 | Self-retained low friction pad | Keith A. Miller | 2024-08-06 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more | 2024-07-02 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more | 2024-02-27 |
| 11670493 | Isolator ring clamp and physical vapor deposition chamber incorporating same | Keith A. Miller | 2023-06-06 |
| 11618943 | PVD target having self-retained low friction pads | Keith A. Miller | 2023-04-04 |
| D970566 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, William Fruchterman, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2022-11-22 |
| 11339466 | Heated shield for physical vapor deposition chamber | Keith A. Miller, Goichi Yoshidome | 2022-05-24 |
| D941371 | Process shield for a substrate processing chamber | Keith A. Miller, Goichi Yoshidome | 2022-01-18 |
| D941372 | Process shield for a substrate processing chamber | Keith A. Miller, Goichi Yoshidome | 2022-01-18 |
| D937329 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, William Fruchterman, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2021-11-30 |
| D934315 | Deposition ring for a substrate processing chamber | Keith A. Miller, Goichi Yoshidome | 2021-10-26 |
| 10998172 | Substrate processing chamber having improved process volume sealing | Keith A. Miller, John Mazzocco | 2021-05-04 |
| 9928997 | Apparatus for PVD dielectric deposition | Keith A. Miller, Thanh X. Nguyen, Randy D. Schmieding, Prashanth Kothnur | 2018-03-27 |
| 9564348 | Shutter blade and robot blade with CTE compensation | Keith A. Miller | 2017-02-07 |
| 8865602 | Edge ring lip | Joseph M. Ranish, Wolfgang Aderhold, Blake Koelmel | 2014-10-21 |
| 7670436 | Support ring assembly | Keith A. Miller | 2010-03-02 |
| 7569125 | Shields usable with an inductively coupled plasma reactor | Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Marc Schweitzer +1 more | 2009-08-04 |
| 7371285 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Alvin Lau, Michael Feltsman | 2008-05-13 |
| 7041201 | Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith | Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Marc Schweitzer +1 more | 2006-05-09 |
| 6776848 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Alvin Lau, Michael Feltsman | 2004-08-17 |
| 6730174 | Unitary removable shield assembly | Alan Liu, Michael Rosenstein | 2004-05-04 |
| 6688838 | Cleanroom lift having an articulated arm | Michael Rosenstein | 2004-02-10 |