| 10036881 |
Digital microscope system for a mobile device |
— |
2018-07-31 |
|
| 8073572 |
Apparatus, method and computer program product for modifying a surface of a component |
— |
2011-12-06 |
|
| 7993470 |
Fabricating and cleaning chamber components having textured surfaces |
Brian T. West, Jennifer Watia |
2011-08-09 |
$4,845,000 |
| 7939747 |
Solar heating method and apparatus |
Bradley O. Stimson |
2011-05-10 |
|
| 7762114 |
Flow-formed chamber component having a textured surface |
Stephen Abney, Anthony Vesci, Joseph F. Sommers, Scott Dickerson, Jennifer Tiller |
2010-07-27 |
$15,482,000 |
| 7569125 |
Shields usable with an inductively coupled plasma reactor |
Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Keith A. Miller +1 more |
2009-08-04 |
$13,023,000 |
| 7371285 |
Motorized chamber lid |
Michael Rosenstein, Alex Shenderovich, Ilya Lavitsky, Alvin Lau, Michael Feltsman |
2008-05-13 |
$25,432,000 |
| 7264679 |
Cleaning of chamber components |
Jennifer Tiller, Brian T. West, Karl Brueckner |
2007-09-04 |
$16,959,000 |
| 7097744 |
Method and apparatus for controlling darkspace gap in a chamber |
Alan Liu, James Van Gogh, Michael Rosenstein, Jennifer Watia, Xinyu Zhang +3 more |
2006-08-29 |
$18,591,000 |
| 7048837 |
End point detection for sputtering and resputtering |
Sasson Somekh, John C. Forster, Zheng Xu, Roderick C. Mosely, Barry Chin +1 more |
2006-05-23 |
$10,996,000 |
| 7041201 |
Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith |
Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Keith A. Miller +1 more |
2006-05-09 |
$14,267,000 |
| 6933508 |
Method of surface texturizing |
Alan Popiolkowski, Shannon Hart, Alan Liu, Jennifer Watia |
2005-08-23 |
$18,503,000 |
| 6827825 |
Method for detecting the position of a shutter disk in a physical vapor deposition chamber |
Michael Feltsman, Allen Lau, Michael Rosenstein |
2004-12-07 |
$16,454,000 |
| 6812471 |
Method of surface texturizing |
Alan Popiolkowski, Shannon Hart, Alan Liu, Jennifer Watia, Brian T. West +1 more |
2004-11-02 |
$17,088,000 |
| 6776848 |
Motorized chamber lid |
Michael Rosenstein, Alex Shenderovich, Ilya Lavitsky, Alvin Lau, Michael Feltsman |
2004-08-17 |
$18,330,000 |
| 6669829 |
Shutter disk and blade alignment sensor |
Michael Feltsman, Allen Lau, Michael Rosenstein |
2003-12-30 |
$36,918,000 |
| 6620296 |
Target sidewall design to reduce particle generation during magnetron sputtering |
James Gogh, Jim Thompson, Yoichiro Tanaka, Alan Liu, ANTHONY CHAN +2 more |
2003-09-16 |
$46,286,000 |
| 6190037 |
Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system |
Ashok Das, Nety M. Krishna, Nalin Patadia, Wei Yang, Umesh M. Kelkar +3 more |
2001-02-20 |
$78,613,000 |
| 6152074 |
Deposition of a thin film on a substrate using a multi-beam source |
Barry Chin, Ivo Raaijmakers |
2000-11-28 |
$69,326,000 |
