Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036881 | Digital microscope system for a mobile device | — | 2018-07-31 |
| 8073572 | Apparatus, method and computer program product for modifying a surface of a component | — | 2011-12-06 |
| 7993470 | Fabricating and cleaning chamber components having textured surfaces | Brian T. West, Jennifer Watia | 2011-08-09 |
| 7939747 | Solar heating method and apparatus | Bradley O. Stimson | 2011-05-10 |
| 7762114 | Flow-formed chamber component having a textured surface | Stephen Abney, Anthony Vesci, Joseph F. Sommers, Scott Dickerson, Jennifer Tiller | 2010-07-27 |
| 7569125 | Shields usable with an inductively coupled plasma reactor | Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Keith A. Miller +1 more | 2009-08-04 |
| 7371285 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Ilya Lavitsky, Alvin Lau, Michael Feltsman | 2008-05-13 |
| 7264679 | Cleaning of chamber components | Jennifer Tiller, Brian T. West, Karl Brueckner | 2007-09-04 |
| 7097744 | Method and apparatus for controlling darkspace gap in a chamber | Alan Liu, James Van Gogh, Michael Rosenstein, Jennifer Watia, Xinyu Zhang +3 more | 2006-08-29 |
| 7048837 | End point detection for sputtering and resputtering | Sasson Somekh, John C. Forster, Zheng Xu, Roderick C. Mosely, Barry Chin +1 more | 2006-05-23 |
| 7041201 | Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith | Tza-Jing Gung, Xianmin Tang, John C. Forster, Peijun Ding, Keith A. Miller +1 more | 2006-05-09 |
| 6933508 | Method of surface texturizing | Alan Popiolkowski, Shannon Hart, Alan Liu, Jennifer Watia | 2005-08-23 |
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Michael Feltsman, Allen Lau, Michael Rosenstein | 2004-12-07 |
| 6812471 | Method of surface texturizing | Alan Popiolkowski, Shannon Hart, Alan Liu, Jennifer Watia, Brian T. West +1 more | 2004-11-02 |
| 6776848 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Ilya Lavitsky, Alvin Lau, Michael Feltsman | 2004-08-17 |
| 6669829 | Shutter disk and blade alignment sensor | Michael Feltsman, Allen Lau, Michael Rosenstein | 2003-12-30 |
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | James Gogh, Jim Thompson, Yoichiro Tanaka, Alan Liu, ANTHONY CHAN +2 more | 2003-09-16 |
| 6190037 | Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system | Ashok Das, Nety M. Krishna, Nalin Patadia, Wei Yang, Umesh M. Kelkar +3 more | 2001-02-20 |
| 6152074 | Deposition of a thin film on a substrate using a multi-beam source | Barry Chin, Ivo Raaijmakers | 2000-11-28 |