Issued Patents All Time
Showing 25 most recent of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406849 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Avgerinos V. Gelatos, Pingyan Lei, Mei Chang | 2025-09-02 |
| 12347695 | Methods for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Tae Hong Ha, Xuesong Lu, Szuheng Ho +3 more | 2025-07-01 |
| 12322573 | Pulsing plasma treatment for film densification | Rui Li, Xiangjin Xie, Anthony Chih-Tung Chan | 2025-06-03 |
| 12272551 | Selective metal removal with flowable polymer | Liqi Wu, Feng Q. Liu, Bhaskar Jyoti Bhuyan, James Hugh Connolly, Zhimin QI +7 more | 2025-04-08 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Lu Chen | 2025-03-04 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Feng Chen, Carmen Leal Cervantes, Yong Jin Kim +4 more | 2025-01-28 |
| 12100576 | Metal oxide preclean chamber with improved selectivity and flow conductance | Andrew Nguyen, Xue Yang Chang, Yu Lei, John C. Forster, Yogananda Sarode Vishwanath +2 more | 2024-09-24 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2024-09-17 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-07-02 |
| 11948836 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha +1 more | 2024-04-02 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu +4 more | 2024-03-26 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-02-27 |
| 11830728 | Methods for seamless gap filling of dielectric material | Chengyu Liu, Ruitong Xiong, Bo Xie, Yijun Liu, Li-Qun Xia | 2023-11-28 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |
| 11802349 | Method for depositing high quality PVD films | Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Yong Cao, Shumao ZHANG +3 more | 2023-10-31 |
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Feng Chen, Tae Hong Ha, Lu Chen, Zhiyuan Wu | 2023-10-10 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Yu Lei, Kelvin Chan +2 more | 2023-10-03 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Feng Chen, Tae Hong Ha, Lu Chen, Zhiyuan Wu | 2023-09-19 |
| 11587873 | Binary metal liner layers | Gang Shen, Feng Chen, Yizhak Sabba, Tae Hong Ha, Zhiyuan Wu +1 more | 2023-02-21 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Xuesong Lu, Tae Hong Ha, Andrew Nguyen, Tza-Jing Gung +4 more | 2023-01-24 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Rui Li, Xiangjin Xie | 2023-01-24 |
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Feng Chen, Rui Li +2 more | 2022-12-13 |
| 11430661 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Avgerinos V. Gelatos, Pingyan Lei, Mei Chang | 2022-08-30 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Tae Hong Ha, Xuesong Lu, Szuheng Ho +3 more | 2022-08-23 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Lu Chen | 2022-08-09 |