Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406849 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | I-Cheng Chen, Avgerinos V. Gelatos, Pingyan Lei, Mei Chang, Xianmin Tang | 2025-09-02 |
| 12347695 | Methods for controlling contact resistance in cobalt-titanium structures | Avgerinos V. Gelatos, Tae Hong Ha, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2025-07-01 |
| 12249489 | Optical device improvement | Yue Chen, Jinyu LU, Yongmei Chen, Jinxin FU, Zihao Yang +6 more | 2025-03-11 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Jallepally Ravi, Pingyan Lei +1 more | 2025-02-18 |
| 12208637 | Patterning of optical device films via inkjet soluble mask, deposition, and lift-off | Yingdong Luo, Jinyu LU, Alexia Adilene PORTILLO RIVERA, Xiaopei Deng, Zhengping Yao +3 more | 2025-01-28 |
| 12110582 | Interfacial layer for optical film performance | Kenichi Ohno, Fariah Hayee, Andrew CEBALLOS, Rami Hourani, Ludovic Godet | 2024-10-08 |
| 11976351 | Titanium oxide optical device films deposited by physical vapor deposition | Kenichi Ohno, Andrew CEBALLOS, Karl J. Armstrong, Rami Hourani, Ludovic Godet | 2024-05-07 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Jallepally Ravi, Pingyan Lei +1 more | 2024-04-09 |
| 11664229 | Nitride capping of titanium material to improve barrier properties | Yiyang WAN | 2023-05-30 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou +3 more | 2023-05-23 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Xiaoxiong Yuan +4 more | 2023-03-07 |
| 11555244 | High temperature dual chamber showerhead | Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Xiaoxiong Yuan, Manjunatha Koppa +1 more | 2023-01-17 |
| 11430661 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | I-Cheng Chen, Avgerinos V. Gelatos, Pingyan Lei, Mei Chang, Xianmin Tang | 2022-08-30 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Avgerinos V. Gelatos, Tae Hong Ha, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2022-08-23 |
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Avgerinos V. Gelatos, Xianmin Tang, Sanjay Natarajan, Keyvan Kashefizadeh +3 more | 2021-09-07 |
| 10770300 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Avgerinos V. Gelatos, I-Cheng Chen, Faruk Gungor | 2020-09-08 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Avgerinos V. Gelatos, Vikash Banthia, Mei Chang, Kazuya Daito | 2020-01-14 |
| 10418246 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Avgerinos V. Gelatos, I-Cheng Chen, Faruk Gungor | 2019-09-17 |
| 9972511 | Substrate processing apparatus and methods | Brent Biggs | 2018-05-15 |
| 9966275 | Methods of treating nitride films | Brent Biggs, Avgerinos V. Gelatos, Mark Lee | 2018-05-08 |