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3D visualization enhancement for depth perception and collision avoidance |
Berk Gonenc |
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Monitoring air pressure within a cell processing system |
Stephen L. Carmichael, Joshua SHEN, Bharat S. THAKKAR, Jong Han Yang |
2025-12-09 |
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Self field-suppression CVD tungsten (W) fill on PVD W liner |
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| D1089130 |
Process chamber manifold |
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Metal oxide preclean for bottom-up gapfill in MEOL and BEOL |
Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more |
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One chamber multi-station selective metal removal |
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Processing chamber with multiple plasma units |
Kazuya Daito, Yu Lei, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more |
2025-02-18 |
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Methods for minimizing feature-to-feature gap fill height variations |
Jiajie Cen, Da He, Yu Lei |
2025-01-07 |
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| 11967525 |
Selective tungsten deposition at low temperatures |
Yufei Hu, Yu Lei, Kazuya Daito, Da He, Jiajie Cen |
2024-04-23 |
$64,043,000 |
| 11955319 |
Processing chamber with multiple plasma units |
Kazuya Daito, Yu Lei, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more |
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Low-temperature plasma pre-clean for selective gap fill |
Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He, Jallepally Ravi +2 more |
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Multi-step pre-clean for selective metal gap fill |
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Selective oxidation and simplified pre-clean |
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Dual plasma pre-clean for selective gap fill |
Yufei Hu, Kazuya Daito, Yu Lei, Dien-Yeh Wu, Jallepally Ravi |
2023-08-08 |
$46,911,000 |
| 11515200 |
Selective tungsten deposition within trench structures |
Yufei Hu, He Ren, Yu Lei, Shi YOU, Kazuya Daito |
2022-11-29 |
$23,914,000 |
| 11421322 |
Blocker plate for use in a substrate process chamber |
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2022-08-23 |
$37,610,000 |
| 11417568 |
Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill |
Wei Lei, Yu Lei, Tae Hong Ha, Raymond Hung, Shirish A. PETHE |
2022-08-16 |
$38,686,000 |
| 11404313 |
Selective tungsten deposition at low temperatures |
Yufei Hu, Yu Lei, Kazuya Daito, Da He, Jiajie Cen |
2022-08-02 |
$46,822,000 |
| 11380536 |
Multi-step pre-clean for selective metal gap fill |
Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more |
2022-07-05 |
$35,888,000 |
| 11371117 |
Process for multi-recycling, low-energy and high-purity extraction of lithium |
— |
2022-06-28 |
|
| 11355391 |
Method for forming a metal gapfill |
Xi Cen, Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito +13 more |
2022-06-07 |
$46,649,000 |
| 11171045 |
Deposition of metal films with tungsten liner |
Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Tae Hong Ha, Xianmin Tang +1 more |
2021-11-09 |
$68,627,000 |
| 11164780 |
Process integration approach for selective metal via fill |
Shi YOU, He Ren, Mehul Naik, Feng Chen |
2021-11-02 |
$95,673,000 |
