Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351909 | Gap fill methods using catalyzed deposition | Byunghoon Yoon, Liqi Wu, Joung Joo Lee, Kai Wu, Wei-Sheng Lei +2 more | 2025-07-08 |
| D1066440 | Process chamber pumping liner | Yang Li, Kai Wu, Min-Han Lee, Mehran Behdjat | 2025-03-11 |
| 12191198 | Low resistivity tungsten film and method of manufacture | Feihu Wang, Joung Joo Lee, Zhibo Yuan, Wei-Sheng Lei, Kai Wu +2 more | 2025-01-07 |
| 12159804 | Tungsten molybdenum structures | Kai Wu, Dixiong WANG, Yi Luo | 2024-12-03 |
| 12094773 | Methods for low resistivity and stress tungsten gap fill | Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more | 2024-09-17 |
| 12014956 | Tungsten gapfill using molybdenum co-flow | Kai Wu | 2024-06-18 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Kai Wu, Seshadri Ganguli, Xinming Zhang, Norman L. Tam, Abhilash J. Mayur | 2024-01-02 |
| 11798845 | Methods and apparatus for low resistivity and stress tungsten gap fill | Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more | 2023-10-24 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more | 2023-10-03 |
| 11680312 | Catalyst enhanced seamless ruthenium gap fill | Byunghoon Yoon, Seshadri Ganguli | 2023-06-20 |
| 11401602 | Catalyst enhanced seamless ruthenium gap fill | Byunghoon Yoon, Seshadri Ganguli | 2022-08-02 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito, Yi Xu +13 more | 2022-06-07 |