| 12351909 |
Gap fill methods using catalyzed deposition |
Byunghoon Yoon, Liqi Wu, Joung Joo Lee, Kai Wu, Wei-Sheng Lei +2 more |
2025-07-08 |
|
| D1066440 |
Process chamber pumping liner |
Yang Li, Kai Wu, Min-Han Lee, Mehran Behdjat |
2025-03-11 |
|
| 12191198 |
Low resistivity tungsten film and method of manufacture |
Feihu Wang, Joung Joo Lee, Zhibo Yuan, Wei-Sheng Lei, Kai Wu +2 more |
2025-01-07 |
|
| 12159804 |
Tungsten molybdenum structures |
Kai Wu, Dixiong WANG, Yi Luo |
2024-12-03 |
$97,002,000 |
| 12094773 |
Methods for low resistivity and stress tungsten gap fill |
Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more |
2024-09-17 |
$46,375,000 |
| 12014956 |
Tungsten gapfill using molybdenum co-flow |
Kai Wu |
2024-06-18 |
$83,264,000 |
| 11859277 |
Catalyst enhanced molybdenum deposition and gap fill |
Kai Wu, Seshadri Ganguli, Xinming Zhang, Norman L. Tam, Abhilash J. Mayur |
2024-01-02 |
$40,045,000 |
| 11798845 |
Methods and apparatus for low resistivity and stress tungsten gap fill |
Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more |
2023-10-24 |
$34,065,000 |
| 11776806 |
Multi-step pre-clean for selective metal gap fill |
Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more |
2023-10-03 |
$34,462,000 |
| 11680312 |
Catalyst enhanced seamless ruthenium gap fill |
Byunghoon Yoon, Seshadri Ganguli |
2023-06-20 |
$48,645,000 |
| 11401602 |
Catalyst enhanced seamless ruthenium gap fill |
Byunghoon Yoon, Seshadri Ganguli |
2022-08-02 |
$46,822,000 |
| 11380536 |
Multi-step pre-clean for selective metal gap fill |
Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more |
2022-07-05 |
$35,888,000 |
| 11355391 |
Method for forming a metal gapfill |
Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito, Yi Xu +13 more |
2022-06-07 |
$46,649,000 |
