Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351909 | Gap fill methods using catalyzed deposition | Byunghoon Yoon, Liqi Wu, Kai Wu, Xi Cen, Wei-Sheng Lei +2 more | 2025-07-08 |
| 12315735 | Methods for removing etch stop layers | Suketu Arun Parikh, Andrew W. Yeoh, Tom Choi, Nitin K. Ingle | 2025-05-27 |
| 12281387 | Method of depositing metal films | Feng Q. Liu, Mark Saly, David Thompson, Annamalai Lakshmanan, Avgerinos V. Gelatos | 2025-04-22 |
| 12191198 | Low resistivity tungsten film and method of manufacture | Feihu Wang, Xi Cen, Zhibo Yuan, Wei-Sheng Lei, Kai Wu +2 more | 2025-01-07 |
| 12183631 | Methods for copper doped hybrid metallization for line and via | Suketu Arun Parikh, Alexander Jansen, Lequn Liu | 2024-12-31 |
| 12104243 | Methods and apparatus for processing a substrate | Annamalai Lakshmanan, Jacqueline S. Wrench, Feihu Wang, Yixiong Yang, Srinivas Gandikota +3 more | 2024-10-01 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Fuhong Zhang, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2024-09-17 |
| 12094785 | Dual silicide process using ruthenium silicide | Thomas Anthony Empante, Avgerinos V. Gelatos, Zhibo Yuan, Liqi Wu, Byunghoon Yoon | 2024-09-17 |
| 12022650 | Low resistivity DRAM buried word line stack | Yixiong Yang, Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota, Annamalai Lakshmanan +2 more | 2024-06-25 |
| 11948885 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Roey Shaviv, Seshadri Ganguli, Shirish A. PETHE +3 more | 2024-04-02 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Fuhong Zhang, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2023-11-07 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Yi Xu, Yu Lei, Xianmin Tang, Kelvin Chan +2 more | 2023-10-03 |
| 11587936 | Low resistivity DRAM buried word line stack | Yixiong Yang, Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota, Annamalai Lakshmanan +2 more | 2023-02-21 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Fuhong Zhang, Rui Li, Xiangjin Xie, Xianmin Tang | 2023-01-24 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil, Xiangjin Xie +1 more | 2022-01-11 |
| 11075165 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Roey Shaviv, Seshadri Ganguli, Shirish A. PETHE +3 more | 2021-07-27 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Fuhong Zhang, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2021-06-15 |
| 10950448 | Film quality control in a linear scan physical vapor deposition process | Bencherki Mebarki, Xianmin Tang | 2021-03-16 |
| 10927451 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Byeong-Chan Lee, Huixiong Dai, Tejinder Singh, Xianmin Tang | 2021-02-23 |
| 10927450 | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition | Bencherki Mebarki, Wenhui Wang, Huixiong Dai, Christopher S. Ngai, Xianmin Tang | 2021-02-23 |
| 10815561 | Method and apparatus for asymmetric selective physical vapor deposition | Bencherki Mebarki, Xianmin Tang, Keith A. Miller, Sree Rangasai V. Kesapragada, Sudarsan Srinivasan | 2020-10-27 |
| 10636655 | Methods for asymmetric deposition of metal on high aspect ratio nanostructures | Ben-Li Sheu, Bencherki Mebarki, Ismail Emesh, Roey Shaviv, Xianmin Tang | 2020-04-28 |
| 10304732 | Methods and apparatus for filling substrate features with cobalt | Wenting Hou, Jianxin Lei, Rong Tao | 2019-05-28 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Adolph Miller Allen +2 more | 2019-05-07 |
| 10157733 | Methods for igniting a plasma in a substrate processing chamber | Shouyin Zhang, Fuhong Zhang | 2018-12-18 |