Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368033 | Methods and apparatus for physical vapor deposition (PVD) dielectric deposition | Jothilingam Ramalingam | 2025-07-22 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2024-09-17 |
| 11842890 | Methods and apparatus for physical vapor deposition (PVD) dielectric deposition | Jothilingam Ramalingam | 2023-12-12 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |
| D970566 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, Ilya Lavitsky, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2022-11-22 |
| 11335577 | Methods and apparatus to prevent interference between processing chambers | Fuhong Zhang, Sunil Kumar Garg, Paul Kiely, Martin Lee Riker, Zheng Wang +1 more | 2022-05-17 |
| D937329 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, Ilya Lavitsky, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2021-11-30 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |
| 10438828 | Methods and apparatus to prevent interference between processing chambers | Fuhong Zhang, Sunil Kumar Garg, Paul Kiely, Martin Lee Riker, Zheng Wang +1 more | 2019-10-08 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, Keith A. Miller, Muhammad M. Rasheed, Thanh X. Nguyen +1 more | 2018-05-01 |