Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412738 | System for target arcing mapping and plasma diagnosis | Junjie PAN, Xiangjin Xie | 2025-09-09 |
| 12203163 | Methods for shaping magnetic fields during semiconductor processing | Goichi Yoshidome, Suhas Bangalore Umesh, Sushil Arun Samant, Martin Lee Riker, Wei Lei +4 more | 2025-01-21 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2024-09-17 |
| D1038901 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Suhas Bangalore Umesh, Madan Kumar Shimoga Mylarappa | 2024-08-13 |
| D1009816 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Keith A. Miller, Luke Vianney Varkey, Kishor Kalathiparambil, Xiangjin Xie | 2024-01-02 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2023-11-07 |
| D998575 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Lanlan Zhong, Kishor Kalathiparambil | 2023-09-12 |
| D997111 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Lanlan Zhong, Kishor Kalathiparambil | 2023-08-29 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Joung Joo Lee, Rui Li, Xiangjin Xie, Xianmin Tang | 2023-01-24 |
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Gang Shen, Feng Chen, Rui Li, Xiangjin Xie +2 more | 2022-12-13 |
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Preetham Rao, Shirish A. PETHE, Kishor Kalathiparambil, Martin Lee Riker +1 more | 2022-11-08 |
| 11393665 | Physical vapor deposition (PVD) chamber with reduced arcing | Chao Du, Yong Cao, Chen Gong, Mingdong Li, Rongjun Wang +1 more | 2022-07-19 |
| 11335577 | Methods and apparatus to prevent interference between processing chambers | Sunil Kumar Garg, Paul Kiely, Martin Lee Riker, William Fruchterman, Zheng Wang +1 more | 2022-05-17 |
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo, Lanlan Zhong +2 more | 2022-04-26 |
| 11309169 | Biasable flux optimizer / collimator for PVD sputter chamber | Martin Lee Riker, Anthony Infante, Zheng Wang | 2022-04-19 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Shirish A. PETHE, Adolph Miller Allen, Lanlan Zhong +1 more | 2022-03-29 |
| D946638 | Target profile for a physical vapor deposition chamber target | Martin Lee Riker, Zheng Wang | 2022-03-22 |
| 11270898 | Apparatus for enhancing flow uniformity in a process chamber | Jothilingam Ramalingam, Kirankumar Neelasandra SAVANDAIAH, William Johanson | 2022-03-08 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Joung Joo Lee, Kishor Kalathiparambil, Xiangjin Xie +1 more | 2022-01-11 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2021-06-15 |
| 10727033 | Biasable flux optimizer / collimator for PVD sputter chamber | Martin Lee Riker, Anthony Infante, Zheng Wang | 2020-07-28 |
| D869409 | Target profile for a physical vapor deposition chamber target | Martin Lee Riker, Xiaodong Wang | 2019-12-10 |
| D868124 | Target profile for a physical vapor deposition chamber target | Martin Lee Riker, Zheng Wang | 2019-11-26 |
| 10438828 | Methods and apparatus to prevent interference between processing chambers | Sunil Kumar Garg, Paul Kiely, Martin Lee Riker, William Fruchterman, Zheng Wang +1 more | 2019-10-08 |
| D859333 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Lanlan Zhong, Zheng Wang | 2019-09-10 |