Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431358 | Methods and materials for enhanced barrier performance and reduced via resistance | Lu Chen, Seshadri Ganguli, Sang Ho Yu | 2025-09-30 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Carmen Leal Cervantes, Yong Jin Kim, Kevin Kashefi +4 more | 2025-01-28 |
| 12157943 | Methods of selective deposition | Wenjing Xu, Gang Shen, Yufei Hu, Tae Hong Ha | 2024-12-03 |
| 12148660 | Low resistance and high reliability metallization module | Roey Shaviv, Suketu Arun Parikh, Lu Chen | 2024-11-19 |
| 11955382 | Reverse selective etch stop layer | Kevin Kashefi, Alexander Jansen, Mehul Naik, He Ren, Lu Chen | 2024-04-09 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Lu Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |
| 11835927 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen +5 more | 2023-12-05 |
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Tae Hong Ha, Xianmin Tang, Lu Chen, Zhiyuan Wu | 2023-10-10 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Tae Hong Ha, Xianmin Tang, Lu Chen, Zhiyuan Wu | 2023-09-19 |
| 11587873 | Binary metal liner layers | Gang Shen, Yizhak Sabba, Tae Hong Ha, Xianmin Tang, Zhiyuan Wu +1 more | 2023-02-21 |
| 11586160 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen +5 more | 2023-02-21 |
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Rui Li, Xiangjin Xie +2 more | 2022-12-13 |
| 11171046 | Methods for forming cobalt and ruthenium capping layers for interconnect structures | Yufei Hu, Wenjing Xu, Gang Shen, Zhiyuan Wu, Tae Hong Ha | 2021-11-09 |
| 11164780 | Process integration approach for selective metal via fill | Shi YOU, He Ren, Mehul Naik, Yi Xu | 2021-11-02 |