Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431358 | Methods and materials for enhanced barrier performance and reduced via resistance | Seshadri Ganguli, Sang Ho Yu, Feng Chen | 2025-09-30 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Xianmin Tang | 2025-03-04 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Feng Chen, Carmen Leal Cervantes, Yong Jin Kim +4 more | 2025-01-28 |
| 12195845 | Conditioning treatment for ALD productivity | Christina L. Engler | 2025-01-14 |
| 12148660 | Low resistance and high reliability metallization module | Roey Shaviv, Suketu Arun Parikh, Feng Chen | 2024-11-19 |
| 11955382 | Reverse selective etch stop layer | Kevin Kashefi, Alexander Jansen, Mehul Naik, He Ren, Feng Chen | 2024-04-09 |
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Zhiyuan Wu | 2023-10-10 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Zhiyuan Wu | 2023-09-19 |
| 11566324 | Conditioning treatment for ALD productivity | Christina L. Engler | 2023-01-31 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Xianmin Tang | 2022-08-09 |
| 11270911 | Doping of metal barrier layers | Christina L. Engler, Gang Shen, Feng Chen, Tae Hong Ha, Xianmin Tang | 2022-03-08 |
| 9303318 | Multiple complementary gas distribution assemblies | Tuoh Bin Ng, Yuriy Melnik, Lily Pang, Eda Tuncel, Son T. Nguyen | 2016-04-05 |
| 8980002 | Methods for improved growth of group III nitride semiconductor compounds | Yuriy Melnik, Hidehiro Kojiri | 2015-03-17 |
| 8882870 | Coated tool | — | 2014-11-11 |
| 8853086 | Methods for pretreatment of group III-nitride depositions | Yuriy Melnik, Hidehiro Kojiri | 2014-10-07 |
| 8778783 | Methods for improved growth of group III nitride buffer layers | Yuriy Melnik, Hidehiro Kojiri | 2014-07-15 |
| 4748878 | Impact socket wrench or an attachment assembly with hammering effect | — | 1988-06-07 |