Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557464 | Semiconductor chamber coatings and processes | Laksheswar Kalita, Dmitry Lubomirsky, Kenneth D. Schatz | 2023-01-17 |
| 11322337 | Plasma processing system workpiece carrier with thermally isolated heater plate blocks | Dmitry Lubomirsky, Anh N. Nguyen, David Palagashvili | 2022-05-03 |
| 11302520 | Chamber apparatus for chemical etching of dielectric materials | Tien Fak Tan, Dmitry Lubomirsky, Kirby H. Floyd, David Palagashvili, Alexander Tam +1 more | 2022-04-12 |
| 11257693 | Methods and systems to improve pedestal temperature control | Dmitry Lubomirsky, Chungman Kim, Kirby H. Floyd | 2022-02-22 |
| 10633738 | Chamber component with protective coating suitable for protection against fluorine plasma | Michael Fong | 2020-04-28 |
| 10431435 | Wafer carrier with independent isolated heater zones | Dmitry Lubomirsky, Anh N. Nguyen, David Palagashvill | 2019-10-01 |
| 10424463 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-09-24 |
| 10424464 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-09-24 |
| 9766022 | Gas heater | Tao Hou, Kenric Choi, Anh N. Nguyen | 2017-09-19 |
| 9499898 | Layered thin film heater and method of fabrication | Dmitry Lubomirsky | 2016-11-22 |
| 9349605 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Anchuan Wang | 2016-05-24 |
| 9312154 | CVD apparatus for improved film thickness non-uniformity and particle performance | Binh Tran, Anqing Cui, Bernard L. Hwang, Anh N. Nguyen, Sean M. Seutter +1 more | 2016-04-12 |
| 9303318 | Multiple complementary gas distribution assemblies | Tuoh Bin Ng, Yuriy Melnik, Lily Pang, Eda Tuncel, Lu Chen | 2016-04-05 |
| 9117867 | Electrostatic chuck assembly | Bernard L. Hwang, Jose Antonio Marin | 2015-08-25 |
| 8999106 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Wei Liu, Johanes F. Swenberg, Hanh Nguyen, Roger Curtis, Philip A. Bottini +1 more | 2015-04-07 |
| 8954371 | Systems and/or methods for dynamic selection of rules processing mode | Barry Dresdner | 2015-02-10 |
| 8859703 | Bimodal pipe resin and products made therefrom | Tim Coffy, Steven D. Gray, David Knoeppel, Cyril Chevillard, David Rauscher +7 more | 2014-10-14 |
| 8568529 | HVPE chamber hardware | Tetsuya Ishikawa, David H. Quach, Anzhong Chang, Olga Kryliouk, Yuriy Melnik +2 more | 2013-10-29 |
| 8546273 | Methods and apparatus for forming nitrogen-containing layers | Malcolm J. Bevan, Johanes F. Swenberg, Wei Liu, Jose Antonio Marin, Jian Li | 2013-10-01 |
| 8491720 | HVPE precursor source hardware | Tetsuya Ishikawa, David H. Quach, Anzhong Chang, Olga Kryliouk, Yuriy Melnik +2 more | 2013-07-23 |
| 8481433 | Methods and apparatus for forming nitrogen-containing layers | Malcolm J. Bevan, Johanes F. Swenberg, Wei Liu, Jose Antonio Marin, Jian Li | 2013-07-09 |
| 8425977 | Substrate processing chamber with off-center gas delivery funnel | Nir Merry | 2013-04-23 |
| 8419855 | Substrate processing chamber with off-center gas delivery funnel | Nir Merry | 2013-04-16 |
| 8309874 | Gas heater | Tao Hou, Kenric Choi, Anh N. Nguyen | 2012-11-13 |
| D664172 | Dome assembly for a deposition chamber | Tetsuya Ishikawa, David H. Quach, Anzhong Chang, Olga Kryliouk, Yuriy Melnik +2 more | 2012-07-24 |