KF

Kirby H. Floyd

Applied Materials: 12 patents #1,120 of 7,310Top 20%
FM Fmc: 1 patents #867 of 1,735Top 50%
Overall (All Time): #374,033 of 4,157,543Top 9%
13
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11302520 Chamber apparatus for chemical etching of dielectric materials Tien Fak Tan, Dmitry Lubomirsky, Son T. Nguyen, David Palagashvili, Alexander Tam +1 more 2022-04-12
11257693 Methods and systems to improve pedestal temperature control Son T. Nguyen, Dmitry Lubomirsky, Chungman Kim 2022-02-22
10460915 Rotatable substrate support having radio frequency applicator Satoru Kobayashi, Hiroji Hanawa, Soonam Park, Dmitry Lubomirsky 2019-10-29
9922819 Wafer rotation in a semiconductor chamber Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois +2 more 2018-03-20
9593419 Wafer rotation in a semiconductor chamber Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois +2 more 2017-03-14
9285168 Module for ozone cure and post-cure moisture treatment Dmitry Lubomirsky, Jay D. Pinson, II, Adib Khan, Shankar Venkataraman 2016-03-15
8524004 Loadlock batch ozone cure Dmitry Lubomirsky, Jay D. Pinson, II, Adib Khan, Shankar Venkataraman 2013-09-03
7790229 High resolution substrate holder leveling device and method 2010-09-07
7754282 Adjusting a spacing between a gas distribution member and a substrate support Adrian Q. Montgomery, Jennifer Gonzales, Won Bae Bang, Rong Pan, Amna Mohammed +1 more 2010-07-13
7572340 High resolution substrate holder leveling device and method 2009-08-11
7413612 In situ substrate holder leveling method and apparatus Adrian Q. Montgomery, Jennifer Gonzales, Won Bae Bang, Rong Pan, Amna Mohammed +1 more 2008-08-19
7037376 Backflush chamber clean Keith Harvey, Karthik Janakiraman 2006-05-02
5396692 Non-linear torsional assist mechanism and method John Busuttil 1995-03-14