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Chamber apparatus for chemical etching of dielectric materials |
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Rotatable substrate support having radio frequency applicator |
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Wafer rotation in a semiconductor chamber |
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Wafer rotation in a semiconductor chamber |
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Module for ozone cure and post-cure moisture treatment |
Dmitry Lubomirsky, Jay D. Pinson, II, Adib Khan, Shankar Venkataraman |
2016-03-15 |
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Loadlock batch ozone cure |
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High resolution substrate holder leveling device and method |
— |
2010-09-07 |
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Adjusting a spacing between a gas distribution member and a substrate support |
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2009-08-11 |
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Backflush chamber clean |
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Non-linear torsional assist mechanism and method |
John Busuttil |
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