Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302520 | Chamber apparatus for chemical etching of dielectric materials | Tien Fak Tan, Dmitry Lubomirsky, Kirby H. Floyd, Son T. Nguyen, David Palagashvili +1 more | 2022-04-12 |
| 10811232 | Multi-plate faceplate for a processing chamber | Deepak Doddabelavangala Srikantaiah, Sheshraj Tulshibagwale, Saravjeet Singh | 2020-10-20 |
| 10130958 | Showerhead assembly with gas injection distribution devices | Anzhong Chang, Sumedh Acharya | 2018-11-20 |
| 10062587 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Elisha Tam | 2018-08-28 |
| 9892941 | Multi-zone resistive heater | Anqing Cui, Binh Tran, Jacob Smith, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more | 2018-02-13 |
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2017-05-09 |
| 9267739 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Elisha Tam | 2016-02-23 |
| 8910644 | Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas | Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more | 2014-12-16 |
| 8679956 | Multiple precursor showerhead with by-pass ports | Anzhong Chang, Sumedh Acharya | 2014-03-25 |
| 8481118 | Multi-gas straight channel showerhead | Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2013-07-09 |
| 8361892 | Multiple precursor showerhead with by-pass ports | Anzhong Chang, Sumedh Acharya | 2013-01-29 |
| D664170 | Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass | Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more | 2012-07-24 |
| D642605 | Lid assembly for a substrate processing chamber | Tetsuya Ishikawa, David H. Quach | 2011-08-02 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2011-07-12 |
| 7674352 | System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus | David P. Bour, Lori D. Washington, Sandeep Nijhawan, Ronald Stevens, Jacob Smith +5 more | 2010-03-09 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Errol Antonio C. Sanchez +2 more | 2003-06-24 |
| 4585223 | Envelope feeder | — | 1986-04-29 |