| 11302520 |
Chamber apparatus for chemical etching of dielectric materials |
Tien Fak Tan, Dmitry Lubomirsky, Kirby H. Floyd, Son T. Nguyen, David Palagashvili +1 more |
2022-04-12 |
| 10811232 |
Multi-plate faceplate for a processing chamber |
Deepak Doddabelavangala Srikantaiah, Sheshraj Tulshibagwale, Saravjeet Singh |
2020-10-20 |
| 10130958 |
Showerhead assembly with gas injection distribution devices |
Anzhong Chang, Sumedh Acharya |
2018-11-20 |
| 10062587 |
Pedestal with multi-zone temperature control and multiple purge capabilities |
Xinglong Chen, Jang-Gyoo Yang, Elisha Tam |
2018-08-28 |
| 9892941 |
Multi-zone resistive heater |
Anqing Cui, Binh Tran, Jacob Smith, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more |
2018-02-13 |
| 9644267 |
Multi-gas straight channel showerhead |
Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more |
2017-05-09 |
| 9267739 |
Pedestal with multi-zone temperature control and multiple purge capabilities |
Xinglong Chen, Jang-Gyoo Yang, Elisha Tam |
2016-02-23 |
| 8910644 |
Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas |
Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more |
2014-12-16 |
| 8679956 |
Multiple precursor showerhead with by-pass ports |
Anzhong Chang, Sumedh Acharya |
2014-03-25 |
| 8481118 |
Multi-gas straight channel showerhead |
Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more |
2013-07-09 |
| 8361892 |
Multiple precursor showerhead with by-pass ports |
Anzhong Chang, Sumedh Acharya |
2013-01-29 |
| D664170 |
Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass |
Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more |
2012-07-24 |
| D642605 |
Lid assembly for a substrate processing chamber |
Tetsuya Ishikawa, David H. Quach |
2011-08-02 |
| 7976631 |
Multi-gas straight channel showerhead |
Brian H. Burrows, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more |
2011-07-12 |
| 7674352 |
System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus |
David P. Bour, Lori D. Washington, Sandeep Nijhawan, Ronald Stevens, Jacob Smith +5 more |
2010-03-09 |
| 6582522 |
Emissivity-change-free pumping plate kit in a single wafer chamber |
Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Errol Antonio C. Sanchez +2 more |
2003-06-24 |
| 4585223 |
Envelope feeder |
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1986-04-29 |
