Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892941 | Multi-zone resistive heater | Anqing Cui, Binh Tran, Alexander Tam, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more | 2018-02-13 |
| 7781016 | Method for measuring precursor amounts in bubbler sources | Ronald Stevens, Brendan McDougall, Garry K. Kwong, Sandeep Nijhawan, Lori D. Washington | 2010-08-24 |
| 7674352 | System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus | David P. Bour, Lori D. Washington, Sandeep Nijhawan, Ronald Stevens, Alexander Tam +5 more | 2010-03-09 |
| 7601652 | Method for treating substrates and films with photoexcitation | Kaushal K. Singh, Sean M. Seutter, R. Suryanarayanan Iyer, Steve Ghanayem, Adam Brailove +2 more | 2009-10-13 |
| 7585769 | Parasitic particle suppression in growth of III-V nitride films using MOCVD and HVPE | David P. Bour, Sandeep Nijhawan, Lori D. Washington, David Eaglesham | 2009-09-08 |
| 7575982 | Stacked-substrate processes for production of nitride semiconductor structures | David P. Bour, Sandeep Nijhawan, Lori D. Washington, David Eaglesham | 2009-08-18 |
| 7560364 | Dislocation-specific lateral epitaxial overgrowth to reduce dislocation density of nitride films | David P. Bour, Sandeep Nijhawan, Lori D. Washington | 2009-07-14 |
| 7488690 | Silicon nitride film with stress control | R. Suryanarayanan Iyer, Andrew Lam, Yuji Maeda, Thomas C. Mele, Sean M. Seutter +3 more | 2009-02-10 |
| 7470599 | Dual-side epitaxy processes for production of nitride semiconductor structures | Sandeep Nijhawan, David Eaglesham, Lori D. Washington, David P. Bour | 2008-12-30 |
| 7459380 | Dislocation-specific dielectric mask deposition and lateral epitaxial overgrowth to reduce dislocation density of nitride films | David P. Bour, Sandeep Nijhawa, Lori D. Washington | 2008-12-02 |
| 7416995 | Method for fabricating controlled stress silicon nitride films | R. Suryanarayanan Iyer, Sanjeev Tandon | 2008-08-26 |
| 7399653 | Nitride optoelectronic devices with backside deposition | David P. Bour, Jie Su, Sandeep Nijhawan | 2008-07-15 |
| 7374960 | Stress measurement and stress balance in films | David P. Bour, Sandeep Nijhawan, Lori D. Washington | 2008-05-20 |
| 7364991 | Buffer-layer treatment of MOCVD-grown nitride structures | David P. Bour, Sandeep Nijhawan | 2008-04-29 |