| 12322633 |
Electrostatic chuck with improved temperature control |
Hanish Kumar Panavalappil Kumarankutty, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi, Shekhar ATHANI +2 more |
2025-06-03 |
|
| 11508584 |
Deuterium-containing films |
Mun Kyu Park, Hien Minh Le, Chih-Chiang Chuang |
2022-11-22 |
$48,755,000 |
| 11462411 |
Gate contact over active regions |
Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Anchuan Wang, Sanjay Natarajan +1 more |
2022-10-04 |
$41,370,000 |
| 11370669 |
Amorphous silicon doped yttrium oxide films and methods of formation |
Tatsuya Sato, Li-Qun Xia |
2022-06-28 |
$26,475,000 |
| 11004687 |
Gate contact over active processes |
Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Anchuan Wang, Sanjay Natarajan +1 more |
2021-05-11 |
$77,987,000 |
| 10181535 |
Backplane reinforcement and interconnects for solar cells |
Mehrdad M. Moslehi, David Xuan-Qi Wang, Karl-Josef Kramer, Sam Tone Tor, Anthony Calcaterra |
2019-01-15 |
|
| 9929054 |
Systems and methods for laser splitting and device layer transfer |
Takao Yonehara, Virendra V. Rana, Mehrdad M. Moslehi, Subramanian Tamilmani |
2018-03-27 |
|
| 9892941 |
Multi-zone resistive heater |
Anqing Cui, Binh Tran, Alexander Tam, Jacob Smith, R. Suryanarayanan Iyer +1 more |
2018-02-13 |
$51,254,000 |
| 9842949 |
High-efficiency solar photovoltaic cells and modules using thin crystalline semiconductor absorbers |
Mehrdad M. Moslehi, Pawan Kapur, K.-Josef Kramer, Virendra V. Rana, Anand Deshpande +8 more |
2017-12-12 |
|
| 9806220 |
Metal foil metallization for backplane-attached solar cells and modules |
Mehrdad M. Moslehi, Thom Stalcup, Karl-Josef Kramer, Anthony Calcaterra, Virendra V. Rana +2 more |
2017-10-31 |
|
| 9799522 |
Aluminum oxide passivation and damage removal for solar cells |
Pawan Kapur, Anand Deshpande, Heather Deshazer, Virendra V. Rana, Solene Coutant +2 more |
2017-10-24 |
|
| 9768343 |
Damage free laser patterning of transparent layers for forming doped regions on a solar cell substrate |
Virendra V. Rana, Pawan Kapur, Mehrdad M. Moslehi |
2017-09-19 |
|
| 9502521 |
Multi-layer charge trap silicon nitride/oxynitride layer engineering with interface region control |
Udayan Ganguly, Christopher S. Olsen, Lucien Date |
2016-11-22 |
$14,203,000 |
| 9379258 |
Fabrication methods for monolithically isled back contact back junction solar cells |
Pawan Kapur, Anand Deshpande, Virendra V. Rana, Mehrdad M. Moslehi |
2016-06-28 |
|
| 9337374 |
High productivity spray processing for the metallization of semiconductor workpieces |
Karl-Josef Kramer, Jay Ashjaee, Mehrdad M. Moslehi, Anthony Calcaterra, David Dutton +2 more |
2016-05-10 |
|
| 9312154 |
CVD apparatus for improved film thickness non-uniformity and particle performance |
Binh Tran, Anqing Cui, Bernard L. Hwang, Son T. Nguyen, Anh N. Nguyen +1 more |
2016-04-12 |
$12,337,000 |
| 9214353 |
Systems and methods for laser splitting and device layer transfer |
Takao Yonehara, Virenda V. Rana, Mehrdad M. Moslehi, Subramanian Tamilmani |
2015-12-15 |
|
| 9196759 |
High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods |
Mehrdad M. Moslehi, Pawan Kapur, Karl-Josef Kramer, David Xuan-Qi Wang, Virendra V. Rana +2 more |
2015-11-24 |
|
| 9012334 |
Formation of a tantalum-nitride layer |
Michael Yang, Ming Xi |
2015-04-21 |
$14,570,000 |
| 8962380 |
High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers |
Mehrdad M. Moslehi, Pawan Kapur, Karl-Josef Kramer, David Xuan-Qi Wang, Virenda V. Rana +2 more |
2015-02-24 |
|
| 8946547 |
Backplane reinforcement and interconnects for solar cells |
Mehrdad M. Moslehi, David Xuan-Qi Wang, Karl-Josef Kramer, Sam Tone Tor, Anthony Calcaterra |
2015-02-03 |
|
| 8114789 |
Formation of a tantalum-nitride layer |
Michael Yang, Ming Xi |
2012-02-14 |
$12,695,000 |
| 7922863 |
Apparatus for integrated gas and radiation delivery |
Martin John Ripley |
2011-04-12 |
$6,345,000 |
| 7846793 |
Plasma surface treatment for SI and metal nanocrystal nucleation |
Christopher S. Olsen, Ming Li, Phillip Kraus |
2010-12-07 |
$3,240,000 |
| 7781326 |
Formation of a tantalum-nitride layer |
Michael Yang, Ming Xi |
2010-08-24 |
$4,612,000 |