Issued Patents All Time
Showing 25 most recent of 142 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431360 | Selective etching between silicon-and-germanium-containing materials with varying germanium concentrations | Jiayin Huang, Zihui Li, Nitin K. Ingle | 2025-09-30 |
| 12394631 | Selective etching of silicon-and-germanium-containing materials with increased surface purities | Jiayin Huang, Zihui Li, Yi Jin, Nitin K. Ingle | 2025-08-19 |
| 12334358 | Integration processes utilizing boron-doped silicon materials | Takehito Koshizawa, Karthik Janakiraman, Rui Cheng, Krishna Nittala, Menghui Li +8 more | 2025-06-17 |
| 12300501 | Systems and methods for selective metal compound removal | Zhenjiang Cui | 2025-05-13 |
| 12272563 | Metal oxide directional removal | Baiwei Wang, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui | 2025-04-08 |
| 12087595 | Metal deposition and etch in high aspect-ratio features | Baiwei Wang, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui | 2024-09-10 |
| 11984325 | Selective removal of transition metal nitride materials | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui | 2024-05-14 |
| 11798813 | Selective removal of ruthenium-containing materials | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui | 2023-10-24 |
| 11769671 | Systems and methods for selective metal compound removal | Zhenjiang Cui | 2023-09-26 |
| 11764058 | Three-color 3D DRAM stack and methods of making | Arvind Kumar, Mahendra Pakala, Ellie Yieh, John Tolle, Thomas Kirschenheiter +1 more | 2023-09-19 |
| 11735467 | Airgap formation processes | Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle +1 more | 2023-08-22 |
| 11728177 | Systems and methods for nitride-containing film removal | Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui | 2023-08-15 |
| 11631589 | Metal etch in high aspect-ratio features | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui | 2023-04-18 |
| 11488835 | Systems and methods for tungsten-containing film removal | Zhenjiang Cui, Rohan Puligoru Reddy | 2022-11-01 |
| 11462411 | Gate contact over active regions | Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2022-10-04 |
| 11335565 | Systems and methods to form airgaps | Zhijun Chen, Lin Xu | 2022-05-17 |
| 11211286 | Airgap formation processes | Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle +1 more | 2021-12-28 |
| 11062921 | Systems and methods for aluminum-containing film removal | Zhenjiang Cui, Rohan Puligoru Reddy, Xiaolin Chen | 2021-07-13 |
| 11004687 | Gate contact over active processes | Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Sanjay Natarajan, Sean M. Seutter +1 more | 2021-05-11 |
| 11004689 | Thermal silicon etch | Zihui Li, Rui Cheng, Nitin K. Ingle, Abhijit Basu Mallick | 2021-05-11 |
| 10872778 | Systems and methods utilizing solid-phase etchants | Zhijun Chen, Chia-Ling Kao, Nitin K. Ingle | 2020-12-22 |
| 10755941 | Self-limiting selective etching systems and methods | Zhijun Chen, Chia-Ling Kao, Nitin K. Ingle | 2020-08-25 |
| 10692880 | 3D NAND high aspect ratio structure etch | Zhenjiang Cui, Hanshen Zhang, Zhijun Chen, Nitin K. Ingle | 2020-06-23 |
| 10615047 | Systems and methods to form airgaps | Zhijun Chen, Lin Xu | 2020-04-07 |
| 10497579 | Water-free etching methods | Zhijun Chen, Lin Xu, Nitin K. Ingle | 2019-12-03 |