| 12431360 |
Selective etching between silicon-and-germanium-containing materials with varying germanium concentrations |
Jiayin Huang, Zihui Li, Nitin K. Ingle |
2025-09-30 |
|
| 12394631 |
Selective etching of silicon-and-germanium-containing materials with increased surface purities |
Jiayin Huang, Zihui Li, Yi Jin, Nitin K. Ingle |
2025-08-19 |
|
| 12334358 |
Integration processes utilizing boron-doped silicon materials |
Takehito Koshizawa, Karthik Janakiraman, Rui Cheng, Krishna Nittala, Menghui Li +8 more |
2025-06-17 |
|
| 12300501 |
Systems and methods for selective metal compound removal |
Zhenjiang Cui |
2025-05-13 |
|
| 12272563 |
Metal oxide directional removal |
Baiwei Wang, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui |
2025-04-08 |
|
| 12087595 |
Metal deposition and etch in high aspect-ratio features |
Baiwei Wang, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui |
2024-09-10 |
$81,152,000 |
| 11984325 |
Selective removal of transition metal nitride materials |
Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui |
2024-05-14 |
$61,768,000 |
| 11798813 |
Selective removal of ruthenium-containing materials |
Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui |
2023-10-24 |
$34,065,000 |
| 11769671 |
Systems and methods for selective metal compound removal |
Zhenjiang Cui |
2023-09-26 |
$66,272,000 |
| 11764058 |
Three-color 3D DRAM stack and methods of making |
Arvind Kumar, Mahendra Pakala, Ellie Yieh, John Tolle, Thomas Kirschenheiter +1 more |
2023-09-19 |
$44,467,000 |
| 11735467 |
Airgap formation processes |
Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle +1 more |
2023-08-22 |
$40,609,000 |
| 11728177 |
Systems and methods for nitride-containing film removal |
Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui |
2023-08-15 |
$42,730,000 |
| 11631589 |
Metal etch in high aspect-ratio features |
Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui |
2023-04-18 |
$36,767,000 |
| 11488835 |
Systems and methods for tungsten-containing film removal |
Zhenjiang Cui, Rohan Puligoru Reddy |
2022-11-01 |
$32,150,000 |
| 11462411 |
Gate contact over active regions |
Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Sanjay Natarajan, Sean M. Seutter +1 more |
2022-10-04 |
$41,370,000 |
| 11335565 |
Systems and methods to form airgaps |
Zhijun Chen, Lin Xu |
2022-05-17 |
$39,228,000 |
| 11211286 |
Airgap formation processes |
Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle +1 more |
2021-12-28 |
$93,125,000 |
| 11062921 |
Systems and methods for aluminum-containing film removal |
Zhenjiang Cui, Rohan Puligoru Reddy, Xiaolin Chen |
2021-07-13 |
$86,517,000 |
| 11004689 |
Thermal silicon etch |
Zihui Li, Rui Cheng, Nitin K. Ingle, Abhijit Basu Mallick |
2021-05-11 |
$77,987,000 |
| 11004687 |
Gate contact over active processes |
Gaurav Thareja, Keyvan Kashefizadeh, Xikun Wang, Sanjay Natarajan, Sean M. Seutter +1 more |
2021-05-11 |
$77,987,000 |
| 10872778 |
Systems and methods utilizing solid-phase etchants |
Zhijun Chen, Chia-Ling Kao, Nitin K. Ingle |
2020-12-22 |
$92,387,000 |
| 10755941 |
Self-limiting selective etching systems and methods |
Zhijun Chen, Chia-Ling Kao, Nitin K. Ingle |
2020-08-25 |
$29,525,000 |
| 10692880 |
3D NAND high aspect ratio structure etch |
Zhenjiang Cui, Hanshen Zhang, Zhijun Chen, Nitin K. Ingle |
2020-06-23 |
$29,749,000 |
| 10615047 |
Systems and methods to form airgaps |
Zhijun Chen, Lin Xu |
2020-04-07 |
$24,481,000 |
| 10497579 |
Water-free etching methods |
Zhijun Chen, Lin Xu, Nitin K. Ingle |
2019-12-03 |
$22,017,000 |
