Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239091 | Etching of metal oxides using fluorine and metal halides | Keenan N. Woods, Mark Saly | 2022-02-01 |
| 10696426 | Menu-type design method for GEO satellite control system based on optimized information integration | Zhicheng Zhou, Baoxiang Sun, Qiang Wei, Guixing Cao, Xiaodong Han +2 more | 2020-06-30 |
| 10692880 | 3D NAND high aspect ratio structure etch | Hanshen Zhang, Anchuan Wang, Zhijun Chen, Nitin K. Ingle | 2020-06-23 |
| 10504746 | HKMG integration | Xing-Fu Zhong, Jie Liu, Linlin Wang | 2019-12-10 |
| 9318383 | Integrated cluster to enable next generation interconnect | Mehul Naik, Abhijit Basu Mallick, Kiran V. Thadani | 2016-04-19 |
| 9312168 | Air gap structure integration using a processing system | Mehul Naik, He Ren | 2016-04-12 |
| 9184093 | Integrated cluster to enable next generation interconnect | Mehul Naik, Abhijit Basu Mallick, Kiran V. Thadani | 2015-11-10 |
| 7030041 | Adhesion improvement for low k dielectrics | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Peter Wai-Man Lee, Hichem M'Saad +2 more | 2006-04-18 |
| 6693050 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Rick J. Roberts, Michael S. Cox, Jun Zhao | 2004-02-17 |