Issued Patents All Time
Showing 25 most recent of 196 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Keiichi Tanaka, Steven Marcus | 2025-09-30 |
| 12410523 | Integrated low k recovery and ALD metal deposition process for advanced technology node | Shinjae Kwon, Xinyi Lu, Fredrick J. Kim, Bo Xie, Chi-I Lang +1 more | 2025-09-09 |
| 12362169 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Mihaela Balseanu, Maribel Maldonado-Garcia | 2025-07-15 |
| 12125675 | RF pulsing assisted low-k film deposition with high mechanical strength | Ruitong Xiong, Bo Xie, Xiaobo Li, Yijun Liu | 2024-10-22 |
| 12119223 | Single precursor low-k film deposition and UV cure for advanced technology node | Bo Xie, Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu | 2024-10-15 |
| 12110589 | Methods for metal oxide post-treatment | Tatsuya Sato, Wei Liu | 2024-10-08 |
| 11990332 | Methods and apparatus for deposition of low-k films | Bhaskar Jyoti Bhuyan, Mark Saly, Zhelin Sun, Ning Li, Mihaela Balseanu +2 more | 2024-05-21 |
| 11967498 | Systems and methods for depositing low-k dielectric films | Bo Xie, Kang Sub Yim, Yijun Liu, Ruitong Xiong | 2024-04-23 |
| 11887818 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li +2 more | 2024-01-30 |
| 11830728 | Methods for seamless gap filling of dielectric material | Chengyu Liu, Ruitong Xiong, Bo Xie, Xianmin Tang, Yijun Liu | 2023-11-28 |
| 11710631 | Tensile nitride deposition systems and methods | Michael Wenyoung Tsiang, Yichuen Lin, Kevin Hsiao, Hang Yu, Deenesh Padhi +1 more | 2023-07-25 |
| 11621162 | Systems and methods for forming UV-cured low-κ dielectric films | Bo Xie, Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu | 2023-04-04 |
| 11600486 | Systems and methods for depositing low-κdielectric films | Bo Xie, Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu | 2023-03-07 |
| 11572622 | Systems and methods for cleaning low-k deposition chambers | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Sure Ngo | 2023-02-07 |
| 11515150 | Hardmask tuning by electrode adjustment | Michael Wenyoung Tsiang, Abdul Aziz Khaja, Kevin Hsiao, Liangfa Hu, Yayun Cheng | 2022-11-29 |
| 11370669 | Amorphous silicon doped yttrium oxide films and methods of formation | Tatsuya Sato, Sean M. Seutter | 2022-06-28 |
| 11367594 | Multizone flow gasbox for processing chamber | Mingle Tong, Daemian Raj | 2022-06-21 |
| 11164753 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Keiichi Tanaka, Steven Marcus | 2021-11-02 |
| 11158489 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li +2 more | 2021-10-26 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Tsutomu Tanaka, Dmitry A. Dzilno, Mario David Silvetti +4 more | 2021-08-03 |
| 11028478 | Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors | Victor Nguyen, Ning Li, Mihaela Balseanu, Mark Saly, David Thompson | 2021-06-08 |
| 11017997 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Mihaela Balseanu, Maribel Maldonado-Garcia | 2021-05-25 |
| 10957532 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly | 2021-03-23 |
| 10943780 | Methods for ALD of metal oxides on metal surfaces | Bhaskar Jyoti Bhuyan, Mark Saly, David Thompson | 2021-03-09 |
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly | 2019-10-22 |