Issued Patents All Time
Showing 25 most recent of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412741 | Silicon oxide gap fill using capacitively coupled plasmas | Madhu Santosh Kumar Mutyala, Hang Yu | 2025-09-09 |
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang +1 more | 2025-08-05 |
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Daemian Raj Benjamin Raj, Xiaopu Li, Akshay Dhanakshirur, Mayur Govind Kulkarni +2 more | 2025-06-24 |
| 12315724 | Helium-free silicon formation | Zeqiong Zhao, Allison Yau, Sang Jin Kim, Akhil Singhal, Zhijun Jiang +1 more | 2025-05-27 |
| 12211908 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang +1 more | 2025-01-28 |
| 12195846 | Modified stacks for 3D NAND | Xinhai Han, Hang Yu, Kesong Hu, Kristopher Enslow, Masaki Ogata +9 more | 2025-01-14 |
| 12198925 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Abhijit A. Kangude, Rahul Rajeev, Shubham Chowdhuri | 2025-01-14 |
| 11948846 | Analyzing in-plane distortion | Wenjiao Wang, Joshua Maher, Xinhai Han, Tza-Jing Gung | 2024-04-02 |
| 11935751 | Boron nitride for mask patterning | Siyu Zhu, Chuanxi Yang, Hang Yu, Yeonju Kwak, Jeong Hwan Kim +2 more | 2024-03-19 |
| 11929278 | Low impedance current path for edge non-uniformity tuning | Madhu Santosh Kumar Mutyala, Saketh Pemmasani, Akshay Dhanakshirur, Mayur Govind Kulkarni, Hang Yu | 2024-03-12 |
| 11869795 | Mesa height modulation for thickness correction | Saketh Pemmasani, Akshay Dhanakshirur, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala, Hang Yu | 2024-01-09 |
| 11817313 | Methods for pressure ramped plasma purge | Madhu Santosh Kumar Mutyala, Sanjay Kamath | 2023-11-14 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang +1 more | 2023-10-10 |
| 11776835 | Power supply signal conditioning for an electrostatic chuck | Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Sanjay Kamath +6 more | 2023-10-03 |
| 11710631 | Tensile nitride deposition systems and methods | Michael Wenyoung Tsiang, Yichuen Lin, Kevin Hsiao, Hang Yu, Yijun Liu +1 more | 2023-07-25 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang +1 more | 2023-05-09 |
| 11637043 | Analyzing in-plane distortion | Wenjiao Wang, Joshua Maher, Xinhai Han, Tza-Jing Gung | 2023-04-25 |
| 11600468 | Multi channel splitter spool | Madhu Santosh Kumar Mutyala, Sanjay Kamath, Arkajit Roy Barman | 2023-03-07 |
| 11594409 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Abhijit A. Kangude, Rahul Rajeev, Shubham Chowdhuri | 2023-02-28 |
| 11569257 | Multi-layer stacks for 3D NAND extendability | Xinhai Han, Er-Xuan Ping, Srinivas Guggilla | 2023-01-31 |
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Chuanxi Yang, Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Allison Yau +2 more | 2022-12-27 |
| 11530478 | Method for forming a hydrophobic and icephobic coating | Rajeev Bajaj, Mei Chang | 2022-12-20 |
| 11515145 | Deposition of silicon boron nitride films | Chuanxi Yang, Hang Yu | 2022-11-29 |
| 11501993 | Semiconductor substrate supports with improved high temperature chucking | Jian Li, Juan Carlos Rocha-Alvarez, Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava +3 more | 2022-11-15 |
| 11430654 | Initiation modulation for plasma deposition | Madhu Santosh Kumar Mutyala, Sanjay Kamath | 2022-08-30 |