Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2025-08-05 |
| 12315724 | Helium-free silicon formation | Zeqiong Zhao, Sang Jin Kim, Akhil Singhal, Zhijun Jiang, Deenesh Padhi +1 more | 2025-05-27 |
| 12211908 | Profile shaping for control gate recesses | Akhil Singhal, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2025-01-28 |
| 12159785 | Dynamic multi zone flow control for a processing system | Daemian Raj Benjamin Raj, Gregory Eugene CHICHKANOFF, Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur +1 more | 2024-12-03 |
| 11798803 | Dynamic multi zone flow control for a processing system | Daemian Raj Benjamin Raj, Gregory Eugene CHICHKANOFF, Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur +1 more | 2023-10-24 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2023-10-10 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-05-09 |
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Chuanxi Yang, Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Xinhai Han +2 more | 2022-12-27 |