Dynamic multi zone flow control for a processing system

Assignee

• Applied Materials

Inventors

• Daemian Raj Benjamin Raj (16 patents)
• Gregory Eugene CHICHKANOFF (6 patents)
• Shailendra Srivastava (17 patents)
• Sai Susmita Addepalli (7 patents)
• Nikhil Sudhindrarao Jorapur (10 patents)
• Abhigyan Keshri (4 patents)
• Allison Yau (8 patents)

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