Helium-free silicon formation

Assignee

• Applied Materials

Inventors

• Zeqiong Zhao (7 patents)
• Allison Yau (8 patents)
• Sang Jin Kim (174 patents)
• Akhil Singhal (26 patents)
• Zhijun Jiang (22 patents)
• Deenesh Padhi (94 patents)
• Ganesh Balasubramanian (114 patents)

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