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3-D NAND control gate enhancement |
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Faceplate having a curved surface |
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3D NAND structures with decreased pitch |
Thomas Jongwan Kwon |
2022-11-29 |
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Semiconductor substrate supports with improved high temperature chucking |
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Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices |
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3-D NAND control gate enhancement |
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