Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094709 | Plasma treatment process to densify oxide layers | Jung Chan Lee, Mun Kyu Park, Jun Seok Lee, Euhngi Lee, Kyu-Ha Shim +5 more | 2024-09-17 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more | 2024-07-16 |
| 11817313 | Methods for pressure ramped plasma purge | Madhu Santosh Kumar Mutyala, Deenesh Padhi | 2023-11-14 |
| 11817320 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Abhijit Basu Mallick, Srinivas Gandikota +1 more | 2023-11-14 |
| 11776835 | Power supply signal conditioning for an electrostatic chuck | Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Dmitry A. Dzilno +6 more | 2023-10-03 |
| 11600468 | Multi channel splitter spool | Madhu Santosh Kumar Mutyala, Deenesh Padhi, Arkajit Roy Barman | 2023-03-07 |
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Chuanxi Yang, Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Allison Yau +2 more | 2022-12-27 |
| 11430654 | Initiation modulation for plasma deposition | Madhu Santosh Kumar Mutyala, Deenesh Padhi | 2022-08-30 |
| 11270903 | Multi zone electrostatic chuck | Madhu Santosh Kumar Mutyala, Deenesh Padhi | 2022-03-08 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, William J. Durand, Lakmal C. Kalutarage +6 more | 2022-01-04 |
| 11157661 | Process development visualization tool | Vinayak Veer Vats, Sidharth Bhatia, Garrett H. Sin, Pramod Nambiar, Hang Yu +2 more | 2021-10-26 |
| 10950430 | Pulsed plasma deposition etch step coverage improvement | Vinayak Veer Vats, Hang Yu, Deenesh Padhi, Changling Li, Gregory M. Amico | 2021-03-16 |
| 10410869 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Abhijit Basu Mallick, Srinivas Gandikota +1 more | 2019-09-10 |
| 9362107 | Flowable low-k dielectric gapfill treatment | Kiran V. Thadani, Abhijit Basu Mallick | 2016-06-07 |
| 7967913 | Remote plasma clean process with cycled high and low pressure clean steps | Zhong Qiang Hua, Young S. Lee, Ellie Yieh, Hien Minh Le, Anjana M. Patel +1 more | 2011-06-28 |
| 7799704 | Gas baffle and distributor for semiconductor processing chamber | Soonam Park, Farhan Ahmad, Hemant P. Mungekar, Young S. Lee, Siqing Lu | 2010-09-21 |
| 7740706 | Gas baffle and distributor for semiconductor processing chamber | Soonam Park, Farhan Ahmad, Hemant P. Mungekar, Young S. Lee, Siqing Lu | 2010-06-22 |
| 7704897 | HDP-CVD SiON films for gap-fill | Hemant P. Mungekar, Young S. Lee, Agnieszka Jakubowicz, Zhong Qiang Hua, Rionard Purnawan +1 more | 2010-04-27 |