| 12094709 |
Plasma treatment process to densify oxide layers |
Jung Chan Lee, Mun Kyu Park, Jun Seok Lee, Euhngi Lee, Kyu-Ha Shim +5 more |
2024-09-17 |
| 12040210 |
Multi-pressure bipolar electrostatic chucking |
Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more |
2024-07-16 |
| 11817313 |
Methods for pressure ramped plasma purge |
Madhu Santosh Kumar Mutyala, Deenesh Padhi |
2023-11-14 |
| 11817320 |
CVD based oxide-metal multi structure for 3D NAND memory devices |
Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Abhijit Basu Mallick, Srinivas Gandikota +1 more |
2023-11-14 |
| 11776835 |
Power supply signal conditioning for an electrostatic chuck |
Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Dmitry A. Dzilno +6 more |
2023-10-03 |
| 11600468 |
Multi channel splitter spool |
Madhu Santosh Kumar Mutyala, Deenesh Padhi, Arkajit Roy Barman |
2023-03-07 |
| 11538677 |
Systems and methods for depositing high density and high tensile stress films |
Chuanxi Yang, Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Allison Yau +2 more |
2022-12-27 |
| 11430654 |
Initiation modulation for plasma deposition |
Madhu Santosh Kumar Mutyala, Deenesh Padhi |
2022-08-30 |
| 11270903 |
Multi zone electrostatic chuck |
Madhu Santosh Kumar Mutyala, Deenesh Padhi |
2022-03-08 |
| 11217443 |
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates |
Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, William J. Durand, Lakmal C. Kalutarage +6 more |
2022-01-04 |
| 11157661 |
Process development visualization tool |
Vinayak Veer Vats, Sidharth Bhatia, Garrett H. Sin, Pramod Nambiar, Hang Yu +2 more |
2021-10-26 |
| 10950430 |
Pulsed plasma deposition etch step coverage improvement |
Vinayak Veer Vats, Hang Yu, Deenesh Padhi, Changling Li, Gregory M. Amico |
2021-03-16 |
| 10410869 |
CVD based oxide-metal multi structure for 3D NAND memory devices |
Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Abhijit Basu Mallick, Srinivas Gandikota +1 more |
2019-09-10 |
| 9362107 |
Flowable low-k dielectric gapfill treatment |
Kiran V. Thadani, Abhijit Basu Mallick |
2016-06-07 |
| 7967913 |
Remote plasma clean process with cycled high and low pressure clean steps |
Zhong Qiang Hua, Young S. Lee, Ellie Yieh, Hien Minh Le, Anjana M. Patel +1 more |
2011-06-28 |
| 7799704 |
Gas baffle and distributor for semiconductor processing chamber |
Soonam Park, Farhan Ahmad, Hemant P. Mungekar, Young S. Lee, Siqing Lu |
2010-09-21 |
| 7740706 |
Gas baffle and distributor for semiconductor processing chamber |
Soonam Park, Farhan Ahmad, Hemant P. Mungekar, Young S. Lee, Siqing Lu |
2010-06-22 |
| 7704897 |
HDP-CVD SiON films for gap-fill |
Hemant P. Mungekar, Young S. Lee, Agnieszka Jakubowicz, Zhong Qiang Hua, Rionard Purnawan +1 more |
2010-04-27 |
