Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942365 | Multi-region diffusion barrier containing titanium, silicon and nitrogen | M. Ziaul Karim, Bo Seon Choi, Somilkumar J. Rathi, Niloy Mukherjee | 2024-03-26 |
| 11401607 | TiSiN coating method | M. Ziaul Karim, Bo Seon Choi | 2022-08-02 |
| 11276570 | Multi-layer deposition and treatment of silicon nitride films | Byung Kook Ahn, Seoyoung LEE, Hang Yu | 2022-03-15 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand, Lakmal C. Kalutarage +6 more | 2022-01-04 |
| 11157661 | Process development visualization tool | Sidharth Bhatia, Garrett H. Sin, Pramod Nambiar, Hang Yu, Sanjay Kamath +2 more | 2021-10-26 |
| 10950430 | Pulsed plasma deposition etch step coverage improvement | Hang Yu, Deenesh Padhi, Changling Li, Gregory M. Amico, Sanjay Kamath | 2021-03-16 |