Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950430 | Pulsed plasma deposition etch step coverage improvement | Vinayak Veer Vats, Hang Yu, Deenesh Padhi, Changling Li, Sanjay Kamath | 2021-03-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950430 | Pulsed plasma deposition etch step coverage improvement | Vinayak Veer Vats, Hang Yu, Deenesh Padhi, Changling Li, Sanjay Kamath | 2021-03-16 |