Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400833 | Methods and apparatus for processing a substrate | Abhishek Chowdhury, Jon C. Farr, Ravikumar Patil, Eller Y. Juco, Yi Zheng | 2025-08-26 |
| 12106945 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Cheonkyu Lee, Takafumi Noguchi | 2024-10-01 |
| 12100579 | Deposition ring for thin substrate handling via edge clamping | Abhishek Chowdhury, Edwin C. Suarez, Harisha Sathyanarayana, Nataraj Bhaskar Rao | 2024-09-24 |
| D1038049 | Cover ring for use in semiconductor processing chamber | Abhishek Chowdhury, Harisha Sathyanarayana, Edwin C. Suarez, Nataraj Bhaskar Rao | 2024-08-06 |
| 11996315 | Thin substrate handling via edge clamping | Abhishek Chowdhury, Harisha Sathyanarayana, Edwin C. Suarez, Nataraj Bhaskar Rao | 2024-05-28 |
| 11881375 | Common substrate and shadow ring lift apparatus | Abhishek Chowdhury, Nataraj Bhaskar Rao, Ravikumar Patil | 2024-01-23 |
| 11728198 | Electrostatic chuck and wafer etching device including the same | Myoung Soo Park, Michio Ishikawa, Masashi Kikuchi | 2023-08-15 |
| 11538697 | Substrate processing apparatus | Sang Ki Nam, Jang-Yeob Lee, Sungyeol Kim, Sunghyup Kim, Soonam Park | 2022-12-27 |
| 11244839 | Plasma processing apparatus | Cheonkyu Lee, Takafumi Noguchi | 2022-02-08 |
| 10529618 | Methods of manufacturing a semiconductor device | Sang-Hoon Ahn, Xinglong Chen, Ki Hyun Kim, Kyu In Shim | 2020-01-07 |
| 9685655 | Complex showerhead coating apparatus with electrospray for lithium ion battery | Fei Wang, Hooman Bolandi, Connie P. Wang, Victor Pebenito, Michael Kutney +2 more | 2017-06-20 |
| 7811411 | Thermal management of inductively coupled plasma reactors | Qiwei Liang, Irene Chou, Steven H. Kim, Young S. Lee, Ellie Yieh +1 more | 2010-10-12 |
| 7799704 | Gas baffle and distributor for semiconductor processing chamber | Soonam Park, Farhan Ahmad, Hemant P. Mungekar, Sanjay Kamath, Young S. Lee | 2010-09-21 |
| 7789993 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Xinglong Chen, Weiyi Luo, Zhong Qiang Hua +4 more | 2010-09-07 |
| 7777483 | Method and apparatus for measuring a thickness of a layer of a wafer | Lawrence Chung-Lai Lei, Yu-Chia Chang, Cecilia Martner, Quyen Pham, Yu Gu +3 more | 2010-08-17 |
| 7740706 | Gas baffle and distributor for semiconductor processing chamber | Soonam Park, Farhan Ahmad, Hemant P. Mungekar, Sanjay Kamath, Young S. Lee | 2010-06-22 |
| 7722719 | Gas baffle and distributor for semiconductor processing chamber | Lawrence Chung-Lai Lei, Steven Gianoulakis, Won Bae Bang, David Sun, Yen-Kun Wang | 2010-05-25 |
| 7651587 | Two-piece dome with separate RF coils for inductively coupled plasma reactors | Qiwei Liang, Canfeng Lai, Robert Chen, Jason Bloking, Irene Chou +3 more | 2010-01-26 |
| 7572647 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Xinglong Chen, Weiyi Luo, Zhong Qiang Hua +4 more | 2009-08-11 |
| 7510624 | Self-cooling gas delivery apparatus under high vacuum for high density plasma applications | Qiwei Liang | 2009-03-31 |
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate | Lawrence Chung-Lai Lei, Yu-Chia Chang, Cecilia Martner, Quyen Pham, Yu Gu +3 more | 2008-04-08 |
| 7201803 | Valve control system for atomic layer deposition chamber | Yu-Chia Chang, Dongxi Sun, Vinh Dang, Michael Yang, Anzhong Chang +2 more | 2007-04-10 |
| 7112961 | Method and apparatus for dynamically measuring the thickness of an object | Lawrence Chung-Lai Lei, Yu-Chia Chang, Cecilia Martner, Quyen Pham, Yu Gu +3 more | 2006-09-26 |
| 6734020 | Valve control system for atomic layer deposition chamber | Yu-Chia Chang, Dongxi Sun, Vinh Dang, Michael Yang, Anzhong Chang +2 more | 2004-05-11 |
| 6660126 | Lid assembly for a processing system to facilitate sequential deposition techniques | Anh N. Nguyen, Michael Yang, Ming Xi, Hua Chung, Anzhong Chang +1 more | 2003-12-09 |