Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211709 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, Haoquan Fang, David Cheung, Gnanamani Amburose, Eunsuk Ko +1 more | 2025-01-28 |
| 11694911 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, Haoquan Fang, David Cheung, Gnanamani Amburose, Eunsuk Ko +1 more | 2023-07-04 |
| 7789993 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Xinglong Chen, Zhong Qiang Hua, Siqing Lu +4 more | 2010-09-07 |
| 7572647 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Xinglong Chen, Zhong Qiang Hua, Siqing Lu +4 more | 2009-08-11 |