Issued Patents All Time
Showing 25 most recent of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272571 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, Haoquan Fang, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12272570 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, Haoquan Fang, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12211709 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, Haoquan Fang, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2025-01-28 |
| 11694911 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, Haoquan Fang, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2023-07-04 |
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, Kirk Ostrowski, Nikkon Ghosh, Karthik S. Colinjivadi, Samantha Tan +2 more | 2021-07-13 |
| 10267728 | Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system | Dengliang Yang, Ilia Kalinovski, Haoquan Fang | 2019-04-23 |
| 10109476 | Substrate processing method for depositing a barrier layer to prevent photoresist poisoning | Ilia Kalinovski | 2018-10-23 |
| 9941108 | High dose implantation strip (HDIS) in H2 base chemistry | Haruhiro Harry Goto | 2018-04-10 |
| 9838429 | Dynamic access policies | David Van | 2017-12-05 |
| 9613825 | Photoresist strip processes for improved device integrity | Roey Shaviv, Kirk Ostrowski, Joon Park, Bayu Thedjoisworo, Patrick J. Lord | 2017-04-04 |
| 9591738 | Plasma generator systems and methods of forming plasma | Huatan Qiu, Prashanth Kothnur | 2017-03-07 |
| 9564344 | Ultra low silicon loss high dose implant strip | Haoquan Fang, Jack Kuo, Ilia Kalinovski, Zhao Li, Guhua Yao +2 more | 2017-02-07 |
| 9514954 | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films | Bayu Thedjoisworo, Bradley Jon Jacobs, Ivan L. Berry, III | 2016-12-06 |
| 9397011 | Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper | Haoquan Fang, Yuk-Hong Ting | 2016-07-19 |
| 9209000 | Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes | Huatan Qiu, Woody Chung, Anirban Guha | 2015-12-08 |
| 9034773 | Removal of native oxide with high selectivity | Bayu Thedjoisworo, Joon Park | 2015-05-19 |
| 8916477 | Polysilicon etch with high selectivity | Bayu Thedjoisworo, Jack Kuo, Joon Park | 2014-12-23 |
| 8864935 | Plasma generator apparatus | James A. Fair, Vincent Decaux, Anirban Guha, John H. Keller, Peter Jagusch | 2014-10-21 |
| 8819763 | Dynamic access policies | David Van | 2014-08-26 |
| 8721797 | Enhanced passivation process to protect silicon prior to high dose implant strip | Haoquan Fang, Jack Kuo, Ilia Kalinovski, Ted Li, Andrew Yao | 2014-05-13 |
| 8716143 | Plasma based photoresist removal system for cleaning post ash residue | Kirk Ostrowski | 2014-05-06 |
| 8641862 | High dose implantation strip (HDIS) in H2 base chemistry | Haruhiro Harry Goto | 2014-02-04 |
| 8619552 | Virtual router with a priority value per port | Xiaohong Pan | 2013-12-31 |
| 8591661 | Low damage photoresist strip method for low-K dielectrics | Ted Li, Anirban Guha, Kirk Ostrowski | 2013-11-26 |
| 8444869 | Simultaneous front side ash and backside clean | Haruhiro Harry Goto | 2013-05-21 |