Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10267728 | Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system | Dengliang Yang, Haoquan Fang, David Cheung | 2019-04-23 |
| 10109476 | Substrate processing method for depositing a barrier layer to prevent photoresist poisoning | David Cheung | 2018-10-23 |
| 10068781 | Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma | Stephen M. Sirard, Jeff Hahn | 2018-09-04 |
| 9564344 | Ultra low silicon loss high dose implant strip | David Cheung, Haoquan Fang, Jack Kuo, Zhao Li, Guhua Yao +2 more | 2017-02-07 |
| 8721797 | Enhanced passivation process to protect silicon prior to high dose implant strip | David Cheung, Haoquan Fang, Jack Kuo, Ted Li, Andrew Yao | 2014-05-13 |
| 8058178 | Photoresist strip method for low-k dielectrics | Haruhiro Harry Goto, Khalid Mohamed | 2011-11-15 |
| 7585777 | Photoresist strip method for low-k dielectrics | Haruhiro Harry Goto, Khalid Mohamed | 2009-09-08 |
| 7288484 | Photoresist strip method for low-k dielectrics | Haruhiro Harry Goto, Khalid Mohamed | 2007-10-30 |