Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058178 | Photoresist strip method for low-k dielectrics | Haruhiro Harry Goto, Ilia Kalinovski | 2011-11-15 |
| 7585777 | Photoresist strip method for low-k dielectrics | Haruhiro Harry Goto, Ilia Kalinovski | 2009-09-08 |
| 7288484 | Photoresist strip method for low-k dielectrics | Haruhiro Harry Goto, Ilia Kalinovski | 2007-10-30 |