Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613825 | Photoresist strip processes for improved device integrity | Roey Shaviv, Kirk Ostrowski, David Cheung, Joon Park, Patrick J. Lord | 2017-04-04 |
| 9558928 | Contact clean in high-aspect ratio structures | Helen Zhu, Linda Marquez, Joon Hong Park | 2017-01-31 |
| 9514954 | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films | Bradley Jon Jacobs, Ivan L. Berry, III, David Cheung | 2016-12-06 |
| 9034773 | Removal of native oxide with high selectivity | David Cheung, Joon Park | 2015-05-19 |
| 8916477 | Polysilicon etch with high selectivity | Jack Kuo, David Cheung, Joon Park | 2014-12-23 |