Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825659 | Substrate processing chamber including multiple gas injection points and dual injector | Jason Lee Treadwell, Ivelin Angelov, Cristian Siladie | 2020-11-03 |
| 9911620 | Method for achieving ultra-high selectivity while etching silicon nitride | Helen Zhu, Faisal Yaqoob, Pilyeon Park, Ivan L. Berry, III, Ivelin Angelov +1 more | 2018-03-06 |
| 9558928 | Contact clean in high-aspect ratio structures | Bayu Thedjoisworo, Helen Zhu, Joon Hong Park | 2017-01-31 |
| 8801947 | Methods for forming microlenses | Tinghao Wang, Rao Annapragada, Cecilia Laura Quinteros, Steven M. Kennedy | 2014-08-12 |
| 8033922 | Manually pushed swing | — | 2011-10-11 |
| 7153780 | Method and apparatus for self-aligned MOS patterning | Ervin T. Hill, Oleh Karpenko, Gordon McGarvey | 2006-12-26 |
| 6228774 | High aspect ratio sub-micron contact etch process in an inductively-coupled plasma processing system | — | 2001-05-08 |
| 6165910 | Self-aligned contacts for semiconductor device | Janet M. Flanner, Joel M. Cook, Ian J. Morey | 2000-12-26 |
| 6133153 | Self-aligned contacts for semiconductor device | Janet M. Flanner | 2000-10-17 |
| 5783496 | Methods and apparatus for etching self-aligned contacts | Janet M. Flanner, Prashant Gadgil, Adrian Doe, Joel M. Cook | 1998-07-21 |