Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841483 | Unique process chemistry for etching organic low-k materials | Helen Zhu, James R. Bowers, Wayne Babie, Michael Goss | 2005-01-11 |
| 6777344 | Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications | Rao Annapragada, Chok W. Ho | 2004-08-17 |
| 6696366 | Technique for etching a low capacitance dielectric layer | Susan Ellingboe, Janet M. Flanner, Christine Janowiak, John Lang | 2004-02-24 |
| 6653734 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, Christine Janowiak, John Lang | 2003-11-25 |
| 6426304 | Post etch photoresist strip with hydrogen for organosilicate glass low-&kgr; etch applications | Ting-An Chien, Janet M. Flanner | 2002-07-30 |
| 6410437 | Method for etching dual damascene structures in organosilicate glass | Janet M. Flanner | 2002-06-25 |
| 6383931 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, Christine Janowiak, John Lang | 2002-05-07 |
| 6165910 | Self-aligned contacts for semiconductor device | Janet M. Flanner, Linda Marquez, Joel M. Cook | 2000-12-26 |
| 6114250 | Techniques for etching a low capacitance dielectric layer on a substrate | Susan Ellingboe, Janet M. Flanner | 2000-09-05 |
| 5242538 | Reactive ion etch process including hydrogen radicals | Matt Hamrah, Graham W. Hills | 1993-09-07 |