Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8308962 | Etching processes used in MEMS production | Philip D. Floyd, Teruo Sasagawa, Xiaoming Yan | 2012-11-13 |
| 7105454 | Use of ammonia for etching organic low-k dielectrics | Kuo-Lung Tang, Chung-Ju Lee | 2006-09-12 |
| 6893969 | Use of ammonia for etching organic low-k dielectrics | Kuo-Lung Tang, Chung-Ju Lee | 2005-05-17 |
| 6777344 | Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications | Rao Annapragada, Ian J. Morey | 2004-08-17 |
| 6620733 | Use of hydrocarbon addition for the elimination of micromasking during etching of organic low-k dielectrics | — | 2003-09-16 |
| 6486070 | Ultra-high oxide to photoresist selective etch of high-aspect-ratio openings in a low-pressure, high-density plasma | Fang-Ju Lin, Chuan-Kai Lo | 2002-11-26 |