Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237175 | Polymerization protective liner for reactive ion etch in patterning | Bhaskar Nagabhirava, Phillip Friddle, Yann Mignot, Dominik Metzler | 2025-02-25 |
| 10541141 | Method for selectively etching with reduced aspect ratio dependence | Adarsh Basavalingappa, Peng Wang, Bhaskar Nagabhirava, Prabhakara Gopaladasu, Randolph F. Knarr +2 more | 2020-01-21 |
| 10037890 | Method for selectively etching with reduced aspect ratio dependence | Adarsh Basavalingappa, Peng Wang, Bhaskar Nagabhirava, Prabhakara Gopaladasu, Randolph F. Knarr +2 more | 2018-07-31 |
| 10002773 | Method for selectively etching silicon oxide with respect to an organic mask | Bhaskar Nagabhirava, Adarsh Basavalingappa, Peng Wang, Prabhakara Gopaladasu | 2018-06-19 |
| 9972502 | Systems and methods for performing in-situ deposition of sidewall image transfer spacers | Jae Ho Lee, Changwoo Lee, Phil Friddle, Stefan Schmitz, Naveed Ansari +1 more | 2018-05-15 |
| 7476610 | Removable spacer | Ji Soo Kim, Conan Chiang, Daehan Choi, S. M. Reza Sadjadi | 2009-01-13 |
| 6841483 | Unique process chemistry for etching organic low-k materials | Helen Zhu, James R. Bowers, Ian J. Morey, Wayne Babie | 2005-01-11 |
| 6670278 | Method of plasma etching of silicon carbide | Si Yi Li, Helen Zhu, S. M. Reza Sadjadi, David R. Pirkle, James R. Bowers | 2003-12-30 |
| 4233840 | Method for evaluation of the response of different cores to a recovery process and apparatus therefor | David A. Redford | 1980-11-18 |
| 4217956 | Method of in-situ recovery of viscous oils or bitumen utilizing a thermal recovery fluid and carbon dioxide | Douglas I. Exall | 1980-08-19 |