PF

Phil Friddle

Lam Research: 3 patents #812 of 2,128Top 40%
Overall (All Time): #1,444,139 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10541141 Method for selectively etching with reduced aspect ratio dependence Adarsh Basavalingappa, Peng Wang, Bhaskar Nagabhirava, Michael Goss, Prabhakara Gopaladasu +2 more 2020-01-21
10037890 Method for selectively etching with reduced aspect ratio dependence Adarsh Basavalingappa, Peng Wang, Bhaskar Nagabhirava, Michael Goss, Prabhakara Gopaladasu +2 more 2018-07-31
9972502 Systems and methods for performing in-situ deposition of sidewall image transfer spacers Jae Ho Lee, Changwoo Lee, Stefan Schmitz, Naveed Ansari, Michael Goss +1 more 2018-05-15