Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12309920 | Wiring substrate | Kosuke Ikeda, Kosei ICHIKAWA, Ryo Ando | 2025-05-20 |
| 12300518 | Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid | Kazuki Kosai, Hideaki Udou, Seiya Fujimoto, Yudai TAKANAGA, Takahito Nakashoya +2 more | 2025-05-13 |
| 12237177 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Satoshi Okamura, Tomohito Ura | 2025-02-25 |
| 11715648 | Substrate processing apparatus and substrate drying method | Katsuya Nakata | 2023-08-01 |
| 11626298 | Liquid supply device and liquid supply method | Yusuke Takamatsu, Yasuhiro Takaki, Shinichi Umeno | 2023-04-11 |
| 11515142 | Method of cleaning substrate processing apparatus, and substrate processing system | Pohan Huang | 2022-11-29 |
| 11344931 | Method of removing particles of substrate processing apparatus, and substrate processing apparatus | Gentaro Goshi | 2022-05-31 |
| 11133176 | Substrate processing method, recording medium and substrate processing system | Kento Tsukano, Gentaro Goshi, Takuro Masuzumi, Hiromi Kiyose | 2021-09-28 |
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Noritaka Uchida, Takanori Obaru, Hidetaka Shinohara, Shuuichi Nishikido, Tomohito Ura +1 more | 2021-08-10 |
| 10553421 | Substrate processing apparatus, substrate processing method and storage medium | Seiki Ishida, Hidetaka Shinohara | 2020-02-04 |