Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Masato Nakajo +1 more | 2024-01-09 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Masato Nakajo +1 more | 2022-11-22 |
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Shogo Fukui, Noritaka Uchida, Takanori Obaru, Hidetaka Shinohara, Tomohito Ura +1 more | 2021-08-10 |
| 9716002 | Substrate cleaning method | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Dai Kumagai, Naoto Yoshitaka +2 more | 2017-07-25 |
| 8578953 | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Dai Kumagai, Naoto Yoshitaka +2 more | 2013-11-12 |
| 7766566 | Developing treatment apparatus and developing treatment method | Takahiro Kitano, Masami Akimoto, Dai Kumagai | 2010-08-03 |
| 7431038 | Wet processing device and wet processing method | — | 2008-10-07 |
| 7419316 | Developing treatment apparatus | Tetsuya Kitamura | 2008-09-02 |
| 7387455 | Substrate processing device, substrate processing method, and developing device | Tetsutoshi Awamura, Yukio Kiba, Keiichi Tanaka, Takahiro Okubo | 2008-06-17 |
| 6551400 | Coating apparatus | Keizo Hasbe, Nobuo Konishi, Takayuki Toshima, Kazutoshi Yoshioka | 2003-04-22 |
| 6503003 | Film forming method and film forming apparatus | Keizo Hasebe, Nobuo Konishi, Takayuki Toshima, Kazutoshi Yoshioka | 2003-01-07 |
| 6402399 | Developing method and developing apparatus | Kazuo Sakamoto | 2002-06-11 |
| 6241403 | Developing method and developing apparatus | Kazuo Sakamoto | 2001-06-05 |
| 6228561 | Film forming method and film forming apparatus | Keizo Hasebe, Nobuo Konishi, Takayuki Toshima, Kazutoshi Yoshioka | 2001-05-08 |